Modification of microstructure on PZT films for ultrahigh frequency transducer

被引：9
作者：
Fei, Chunlong [1 ,2 ,3 ,4 ]
Chen, Zeyu [3 ,4 ]
Fong, Wayne Ming [3 ,4 ]
Zhu, Benpeng [3 ,4 ]
Wang, Lingyan [5 ,6 ]
Ren, Wei [5 ,6 ]
Li, Yongxiang [7 ]
Shi, Jing [1 ,2 ]
Shung, K. Kirk [3 ,4 ]
Zhou, Qifa [3 ,4 ]
机构：
[1] Wuhan Univ, Minist Educ, Key Lab Artificial Micro & Nanostruct, Wuhan 430072, Peoples R China
[2] Wuhan Univ, Sch Phys & Technol, Wuhan 430072, Peoples R China
[3] Univ So Calif, NIH Resource Ctr Med Ultrason Transducer Technol, Los Angeles, CA 90089 USA
[4] Univ So Calif, Dept Biomed Engn, Los Angeles, CA 90089 USA
[5] Xi An Jiao Tong Univ, Minist Educ, Key Lab, Elect Mat Res Lab, Xian 710049, Peoples R China
[6] Xi An Jiao Tong Univ, Int Ctr Dielect Res, Xian 710049, Peoples R China
[7] Chinese Acad Sci, Shanghai Inst Ceram, Shanghai 200050, Peoples R China
来源：
CERAMICS INTERNATIONAL | 2015年 / 41卷
基金：
中国国家自然科学基金;
关键词：
Ferroelectric properties; Piezoelectric properties; Porous PZT film; PVP; Ultrahigh frequency ultrasonic transducer; POROUS PIEZOELECTRIC CERAMICS; FERROELECTRIC PROPERTIES; POROSITY; FABRICATION;
D O I：
10.1016/j.ceramint.2015.03.202
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Porous Lead zirconate titanate (PZT) films may have promising applications in high frequency ultrasonic transducers for their capability to modify electrical properties for better electrical and acoustic matching. In this work, porous PZT films in range of several micrometers were fabricated using a chemical solution deposition (CSD) method modified with polyvinylpyrrolidone (PVP) as a pore-foaming agent. The crystalline phase, microstructure and electrical properties of the porous films were investigated as a function of PVP contents, molecular weights and annealing temperatures. It was found that the electrical properties were closely associated with the porosity. (C) 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
引用
收藏
页码：S650 / S655
页数：6
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