Dynamic Response and Modal Analysis of Micro-machined Disk Resonator for RF Application

被引：0

作者：

Chaudhuri, Ashesh Ray ^{[1
]}

Chakraborty, Subha ^{[1
]}

Bhattacharyya, Tarun K. ^{[1
]}

机构：

[1] Indian Inst Technol, Dept Elect & Elect Commun Engn, Kharagpur 721302, W Bengal, India

来源：

APMC: 2009 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5 | 2009年

关键词：

Disk; Resonator; Resonance; Vibration;

D O I：

10.1109/APMC.2009.5384184

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A micro-machined disk resonator has been fabricated using POLYMUMPS process. The resonator has been characterized by Laser Doppler Vibrometer. A detailed modal analysis has been carried out for the disk. The fundamental frequency of vibration of the disk has been estimated analytically and verified with the experimental results. The structure shows radial mode vibration at around 920 MHz which is suitable for RF applications.

引用

页码：516 / 519

页数：4