Tilted Nano-Grating Based Ultra-Compact Broadband Polarizing Beam Splitter for Silicon Photonics

被引：14

作者：

Liu, Haipeng ^{[1
]}

Feng, Jijun ^{[1
]}

Ge, Jinman ^{[2
]}

Zhuang, Shanqing ^{[1
]}

Yuan, Shuo ^{[1
]}

Chen, Yishu ^{[1
]}

Li, Xiaojun ^{[2
]}

Tan, Qinggui ^{[2
]}

Yu, Qinghua ^{[3
]}

Zeng, Heping ^{[4
,5
]}

机构：

[1] Univ Shanghai Sci & Technol, Sch Opt Elect & Comp Engn, Minist Educ, Shanghai Key Lab Modern Opt Syst,Engn Res Ctr Opt, Shanghai 200093, Peoples R China

[2] China Acad Space Technol, Natl Key Lab Sci & Technol Space Microwave, Xian 710100, Peoples R China

[3] Chinese Acad Sci, Shanghai Inst Tech Phys, Key Lab Intelligent Infrared Percept, Shanghai 200083, Peoples R China

[4] East China Normal Univ, Chongqing Inst, Chongqing Key Lab Precis Opt, Chongqing 401120, Peoples R China

[5] East China Normal Univ, State Key Lab Precis Spect, Shanghai 200241, Peoples R China

来源：

NANOMATERIALS | 2021年 / 11卷 / 10期

基金：

中国国家自然科学基金;

关键词：

nano-grating; polarizing beam splitter; silicon photonics; integrated photonics; WAVE-GUIDE; DIRECTIONAL COUPLER; POLARIZATION; DISPERSION;

D O I：

10.3390/nano11102645

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

An ultra-compact broadband silicon polarizing beam splitter is proposed based on a tilted nano-grating structure. A light cross coupling can be realized for transverse-magnetic mode, while the transverse-electric light can almost completely output from the through port. The length of the coupling region is only 6.8 mu m, while an extinction ratio of 23.76 dB can be realized at a wavelength of 1550 nm. As a proof of concept, the device was fabricated by a commercial silicon photonic foundry. It can realize a 19.84 dB extinction ratio and an 80 nm working bandwidth with an extinction ratio of larger than 10 dB. The presented device also shows a good fabrication tolerance to the structure deviations, which is favorable for its practical applications in silicon photonics.</p>

引用

页数：10

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