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- [2] Wafer edge overlay control solution for N7 and beyond ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VII, 2018, 10589
- [5] EFFECT OF WAFER EDGE CUT ON TESTING AND YIELD 2018 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC), 2018,
- [7] Innovative metrology for wafer edge defectivity in immersion lithography METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXI, PTS 1-3, 2007, 6518
- [8] Analysis of Si Wet Etching Effect on Wafer Edge ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES XIII, 2016, 255 : 97 - 101
- [9] Planarization of wafer edge profile in chemical mechanical polishing International Journal of Precision Engineering and Manufacturing, 2013, 14 : 11 - 15
- [10] WAFER EDGE TREATMENT IN LITHOGRAPHIC PROCESS FOR PEELING DEFECT REDUCTION 2017 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC 2017), 2017,