Ammonia sensing characteristics of a cerium oxide thin film coated with platinum nanoparticles

被引:17
作者
Niu, Jing-Shiuan [1 ]
Liu, I-Ping [2 ]
Chen, Kuan-Hsiang [1 ]
Tsai, Jung-Hui [3 ]
Hsu, Wei-Chou [4 ]
Liu, Wen-Chau [4 ]
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, 1 Univ Rd, Tainan 70101, Taiwan
[2] CPC Corp, Green Technol Res Inst, Dept Mat Technol, 2 Tso Nan Rd, Kaohsiung 81126, Taiwan
[3] Natl Kaohsiung Normal Univ, Dept Elect Engn, Kaohsiung 802, Taiwan
[4] Natl Cheng Kung Univ, Acad Innovat Semicond & Sustainable Mfg, Dept Elect Engn, Inst Microelect, 1 Univ Rd, Tainan 70101, Taiwan
来源
SENSORS AND ACTUATORS B-CHEMICAL | 2022年 / 369卷
关键词
Cerium oxide (CeO2); Pt NP; Ammonia gas sensor; SMO; Surface coverage; GAS SENSOR; TEMPERATURE; NH3; PERFORMANCE; CEO2; TRANSPORT; NANORODS; NIO;
D O I
10.1016/j.snb.2022.132241
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
This paper reports on ammonia (NH3) sensing characteristics of a new semiconducting metal oxide (SMO) sensor. employing a cerium oxide (CeO2) thin film and platinum (Pt) nanoparticles (NPs) as a sensing layer. The thickness of CeO2 thin film is 30 nm and the particle size of Pt NPs is about 4-6 nm. Based on the enhanced surface area/volume (S-A/V) ratio and catalytic ability of Pt metal, the sensing behaviors are efficiently improved owing to the smaller Pt NPs. A high sensing response of 5.81 under 1000 ppm NH3/air gas and a low detectable content of 1 ppm NH3/air are acquired at 275 degrees C. In addition, a relatively fast sensing action with the response (recovery) times of 15 s (85 s) and 6 s (25 s) are observed upon exposure to 1000 and 1 ppm NH3/air gas, respectively, at 300 degrees C. The Langmuir isotherm is used to study the related surface coverage under introduced ammonia gas. The proposed Pt NP/CeO2 sensor shows prominent stability for long-term operation without intentional passivation treatment. The proposed sensor device's benefits include a simple device structure, relatively easy manufacturing, a wide sensing range of ammonia gas content (1-1000 ppm NH3/air), and lower cost.
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页数:8
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