The influence of surface structure on the reaction of dimethylzinc on GaAs(100)

被引:7
作者
Venkateswaran, N [1 ]
Roe, CL [1 ]
Lam, HT [1 ]
Vohs, JM [1 ]
机构
[1] UNIV PENN,DEPT CHEM ENGN,PHILADELPHIA,PA 19104
基金
美国国家科学基金会;
关键词
chemical vapour deposition; chemisorption; dimethylzinc; electron energy loss spectroscopy; gallium arsenide; temperature programmed desorption;
D O I
10.1016/0039-6028(96)00664-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The reactions of dimethylzinc (DMZ) on the (4 x 2), (2 x 4) and c(4 x 4) reconstructions of GaAs(100) were studied using temperature programmed desorption (TPD) and high resolution electron energy loss spectroscopy (HREELS). The results of the TPD experiments demonstrate that the strength of the Zn-surface interaction is a function of the surface As/Ga ratio. Zn atoms produced via dissociative absorption of DMZ desorb at 565, 600 and 620 K from the (4 x 2), (2 x 4) and c(4 x 4) reconstructions, respectively. Ln contrast, methyl groups were found to desorb from all three reconstructions at 610 K. HREELS data for the (4 x 2) and c(4 x 4) reconstructions show that the energy of the surface-C stretching mode for absorbed methyl groups is the same on these surfaces. These results indicate that the absorption sites for methyl groups are similar on the three reconstructions. Based on these experimental results, models of the absorption sites for Zn atoms and methyl groups on the (2 x 4) and c(4 x 4) reconstructions of GaAs(100) are proposed.
引用
收藏
页码:125 / 135
页数:11
相关论文
共 47 条
  • [1] THE ADSORPTION AND REACTION OF TRIETHYLGALLIUM ON GAAS(100)
    BANSE, BA
    CREIGHTON, JR
    [J]. SURFACE SCIENCE, 1991, 257 (1-3) : 221 - 229
  • [2] SURFACE RECONSTRUCTIONS OF GAAS(100) OBSERVED BY SCANNING TUNNELING MICROSCOPY
    BIEGELSEN, DK
    BRINGANS, RD
    NORTHRUP, JE
    SWARTZ, LE
    [J]. PHYSICAL REVIEW B, 1990, 41 (09): : 5701 - 5706
  • [3] ATOM-RESOLVED IMAGING AND SPECTROSCOPY ON THE GAAS(001) SURFACE USING TUNNELING MICROSCOPY
    BRESSLERHILL, V
    WASSERMEIER, M
    POND, K
    MABOUDIAN, R
    BRIGGS, GAD
    PETROFF, PM
    WEINBERG, WH
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (04): : 1881 - 1885
  • [4] STRUCTURE OF GAAS(100)-C(8X2)-GA
    CERDA, J
    PALOMARES, FJ
    SORIA, F
    [J]. PHYSICAL REVIEW LETTERS, 1995, 75 (04) : 665 - 668
  • [5] ATOMIC-STRUCTURE OF GAAS(100)-(2X1) AND GAAS(100)-(2X4) RECONSTRUCTED SURFACES
    CHADI, DJ
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 834 - 837
  • [6] CREIGHTON JR, 1991, MATER RES SOC SYMP P, V222, P15, DOI 10.1557/PROC-222-15
  • [7] DECOMPOSITION OF TRIMETHYLGALLIUM ON THE GALLIUM-RICH GAAS (100) SURFACE - IMPLICATIONS FOR ATOMIC LAYER EPITAXY
    CREIGHTON, JR
    LYKKE, KR
    SHAMAMIAN, VA
    KAY, BD
    [J]. APPLIED PHYSICS LETTERS, 1990, 57 (03) : 279 - 281
  • [8] CHEMISORPTION AND DECOMPOSITION OF TRIMETHYLGALLIUM ON GAAS(100)
    CREIGHTON, JR
    [J]. SURFACE SCIENCE, 1990, 234 (03) : 287 - 307
  • [9] PRODUCTS OF THERMAL-DECOMPOSITION OF TRIETHYLGALLIUM AND TRIMETHYLGALLIUM ADSORBED ON GA-STABILIZED GAAS(100)
    DONNELLY, VM
    MCCAULLEY, JA
    [J]. SURFACE SCIENCE, 1990, 238 (1-3) : 34 - 52
  • [10] COMPOSITION AND STRUCTURE OF DIFFERENTLY PREPARED GAAS(100) SURFACES STUDIED BY LEED AND AES
    DRATHEN, P
    RANKE, W
    JACOBI, K
    [J]. SURFACE SCIENCE, 1978, 77 (01) : L162 - L166