Tuning the Pore Size of Ink-Bottle Mesopores by Atomic Layer Deposition

被引：50

作者：

Dendooven, Jolien ^{[1
]}

Goris, Bart ^{[2
]}

Devloo-Casier, Kilian ^{[1
]}

Levrau, Elisabeth ^{[1
,3
]}

Biermans, Ellen ^{[2
]}

Baklanov, Mikhail R. ^{[4
]}

Ludwig, Karl F. ^{[5
]}

Van der Voort, Pascal ^{[3
]}

Bals, Sara ^{[2
]}

Detavernier, Christophe ^{[1
]}

机构：

[1] Univ Ghent, COCOON, Dept Solid State Sci, B-9000 Ghent, Belgium

[2] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium

[3] Univ Ghent, COMOC, Dept Inorgan & Phys Chem, B-9000 Ghent, Belgium

[4] IMEC, B-3001 Louvain, Belgium

[5] Boston Univ, Dept Phys, Boston, MA 02215 USA

来源：

CHEMISTRY OF MATERIALS | 2012年 / 24卷 / 11期

基金：

欧洲研究理事会;

关键词：

ALD; electron tomography; ellipsometric porosimetry; X-ray fluorescence; mesoporous titania; porous film; THIN-FILMS; TIO2;

D O I：

10.1021/cm203754a

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The potential of atomic layer deposition (ALD) for tuning the pore size of cage-like, or ink-bottle shaped, mesopores at the atomic level, was explored. ALD was used to deposit ultrathin TiO 2 and HfO 2 layers in a mesoporous titania film containing ink-bottle shaped pores. The mesoporous titania thin film was coated with HfO 2 using ALD, and Hf-uptake per ALD cycle was monitored in situ by the Hf Lα fluorescent signal. The results show that the pores are ink-bottle shaped, but with cages that are far from spherical and that the HfO 2 coating is uniformly deposited throughout the whole mesoporous film. The HfO 2 thickness that seems to clog the pore necks, 2.2 ∓ 0.5 nm, is in good agreement with the value expected based on the EP measurements. The electron tomography study also confirms that the cages are not completely filled with HfO 2, as expected based on the ink-bottle shape of the pores.

引用

页码：1992 / 1994

页数：3

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