Micro-machining of PMN-PT Crystals with Ultrashort Laser Pulses

被引:10
作者
Piredda, Giovanni [1 ]
Stroj, Sandra [1 ]
Ziss, Dorian [2 ]
Stangl, Julian [2 ]
Trotta, Rinaldo [3 ]
Martin-Sanchez, Javier [4 ]
Rastelli, Armando [2 ]
机构
[1] Vorarlberg Univ Appl Sci, Josef Ressel Ctr Mat Proc Ultrashort Pulsed Laser, Res Ctr Microtechnol, Hsch Str 1, A-6850 Dornbirn, Austria
[2] Johannes Kepler Univ Linz, Inst Semicond & Solid State Phys, Altenbergerstr 69, A-4040 Linz, Austria
[3] Sapienza Univ Roma, Dipartimento Fis, Piazzale A Moro 5, I-00185 Rome, Italy
[4] Univ Oviedo, Dept Fis, E-33007 Oviedo, Spain
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2019年 / 125卷 / 03期
基金
欧洲研究理事会;
关键词
FUSED-SILICA; ABLATION; FEMTOSECOND; POLARIZATION; METALS; STRAIN; GLASS;
D O I
10.1007/s00339-019-2460-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Lead-magnesium niobate lead titanate (PMN-PT) has been proven as an excellent material for sensing and actuating applications. The fabrication of advanced ultra-small PMN-PT-based devices relies on the availability of sophisticated procedures for the micro-machining of PMN-PT thin films or bulk substrates. Approaches reported up to date include chemical etching, excimer laser ablation, and ion milling. To ensure an excellent device performance, a key mandatory feature for a micro-machining process is to preserve as far as possible the crystalline quality of the substrates; in other words, the fabrication method must induce a low density of cracks and other kind of defects. In this work, we demonstrate a relatively fast procedure for the fabrication of high-quality PMN-PT micro-machined actuators employing green femtosecond laser pulses. The fabricated devices feature the absence of extended cracks and well-defined edges with relatively low roughness, which is advantageous for the further integration of nanomaterials onto the piezoelectric actuators.
引用
收藏
页数:11
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