Greenhouse Gas Molecule CO2 Detection Using a Capacitive Micromachined Ultrasound Transducer

被引：23

作者：

Barauskas, Dovydas ^{[1
,2
]}

Pelenis, Donatas ^{[1
,2
]}

Virzonis, Darius ^{[1
,2
]}

Baltrus, John P. ^{[3
]}

Baltrusaitis, Jonas ^{[4
]}

机构：

[1] Kaunas Univ Technol, Panevezys Inst, Dept Elect Engn, Daukanto 12, LT-35212 Paneveys, Lithuania

[2] Panevezys Mechatron Ctr, Lab Micro & Nano Technol, Pilenu 30, LT-36239 Paneveys, Lithuania

[3] US DOE, Natl Energy Technol Lab, 626 Cochrans Mill Rd, Pittsburgh, PA 15236 USA

[4] Lehigh Univ, Dept Chem & Biomol Engn, B336 Iacocca Hall,111 Res Dr, Bethlehem, PA 18015 USA

来源：

ANALYTICAL CHEMISTRY | 2016年 / 88卷 / 13期

关键词：

SILICON-NITRIDE FILMS; CHEMICAL SENSOR; EMISSIONS; CAPTURE;

D O I：

10.1021/acs.analchem.6b02085

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We manufactured and tested a capacitive micromachined ultrasound transducer (CMUT)-based sensor for CO2 detection at environmentally relevant concentrations using polyethylenimine as a CO2 binding material. The assembly of a sensing chip was 10 x 20 mm, and up to 5 gases can potentially be detected simultaneously using a masking technique and different sensing materials. The limit of detection was calculated to be 0.033 CO2 vol % while the limit of quantification was calculated to be 0.102%. The sensor exhibited a linear response between 0.06% and 0.30% CO2 while concentrations dose to those in flue gas can also be measured using dilution with inert gas.

引用

页码：6662 / 6665

页数：4

共 17 条

[1]

Allen DT, 2013, P NATL ACAD SCI USA, V110, P17768, DOI 10.1073/pnas.1304880110

[2]

Barauskas D., 2015, 2015 IEEE INT ULTR S, P1

[3] Polyethylenimine-Impregnated Resin for High CO2 Adsorption: An Efficient Adsorbent for CO2 Capture from Simulated Flue Gas and Ambient Air [J].