A NMF-Based Image Restoration Scheme With Applications to LED Integrated Substrate Defect Detection

被引:7
作者
Chen, Ssu-Han [1 ]
Chiou, Ai-Huei [2 ]
Wang, Chien-Chih [1 ]
机构
[1] Ming Chi Univ Technol, Dept Ind Engn & Management, New Taipei City 24301, Taiwan
[2] Natl Formosa Univ, Dept Mech & Comp Aided Engn, Huwei Township 63201, Yunlin, Taiwan
关键词
Semiconductor defects; machine vision; matrix decomposition; NONNEGATIVE MATRIX FACTORIZATION; SOURCE SEPARATION; INITIALIZATION; DIAGNOSIS;
D O I
10.1109/TSM.2018.2867840
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
To examine surface quality of light emitting diode (LEI)) substrates, human visual inspection is commonly used. However, manual inspection is not reliable because patterns of an integrated substrate are small and repeating. This paper describes a machine vision method for auto-detecting defects embedded on LED substrates. Image of arranged substrates is first grabbed. A global image restoration scheme based on non-negative matrix factorization (NMF) is used to reconstruct a non-negative matrix approximation (NMA) using a matrix of lower dimension and a weight matrix with non-negative elements. Repeating patterns of NMF output, i.e., NMA, can be considered similar to its input counterpart that defects have been excluded. Defects thus can be efficiently revealed by subtracting grabbed image from NMA. A procedure to determine proper basis space size of a specific image using pseudo singular value and a procedure to initialize a proper pair of factors using non-negative double singular value decomposition are also described. The proposed method is compared with methods of Lu and Tsai (2005), Lu and Tsai (2008), Perng and Chen (2010) and Chen and Perng (2011). Overall, results show that G-measure for proposed method under conditions of normal and various exceptions is higher than other available low-rank approximation methods.
引用
收藏
页码:486 / 494
页数:9
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