Calculations and experiments of material removal and kinetic energy during pulsed laser ablation of metals

被引:113
作者
Fahler, S
Krebs, HU
机构
[1] Inst. Metallphysik S., Universität Göttingen, 37073 Göttingen
关键词
D O I
10.1016/0169-4332(95)00466-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Numerical calculations are presented, which describe the processes of target heating and ablation of pure metals (for instance Fe) during irradiation by 30 ns laser pulses at 248 nm. The following effects are taken into account: the absorption of the laser radiation and the heat conduction within the target, the evaporation of material from the target surface, the cooling of the target surface by the heat of evaporation and the partial absorption of the incident laser beam in the evaporated material. As results of the calculations, the temperature profile in the target and the ablated material can be obtained. Furthermore, by energy balance, an energy of the ablated material of up to some 100 eV is obtained. Experiments performed concerning the threshold energy of ablation, the removed mass from the target and the kinetic energy of the deposited ions (by time-of-flight measurements) are in good agreement with the performed calculations.
引用
收藏
页码:61 / 65
页数:5
相关论文
共 15 条
[1]  
HELLWEGE KH, 1985, LANDOLTBORNSTEIN B, V15, P223
[2]   PULSED-LASER ABLATION OF COPPER [J].
JORDAN, R ;
COLE, D ;
LUNNEY, JG ;
MACKAY, K ;
GIVORD, D .
APPLIED SURFACE SCIENCE, 1995, 86 (1-4) :24-28
[3]   MATHEMATICAL-MODEL FOR LASER-ABLATION TO GENERATE NANOSCALE AND SUBMICROMETER-SIZE PARTICLES [J].
KAR, A ;
MAZUMDER, J .
PHYSICAL REVIEW E, 1994, 49 (01) :410-419
[4]   THE CONSTRUCT-VALIDITY OF UNION COMMITMENT - DEVELOPMENT AND DIMENSIONALITY OF A SHORTER SCALE [J].
KELLOWAY, EK ;
CATANO, VM ;
SOUTHWELL, RR .
JOURNAL OF OCCUPATIONAL AND ORGANIZATIONAL PSYCHOLOGY, 1992, 65 :197-211
[6]   LASER SPUTTERING .3. THE MECHANISM OF THE SPUTTERING OF METALS LOW-ENERGY DENSITIES [J].
KELLY, R ;
ROTHENBERG, JE .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :755-763
[7]  
KNACKE O, 1991, THERMOCHEMICAL PROPE, P664
[8]   PULSED-LASER DEPOSITION OF THIN METALLIC ALLOYS [J].
KREBS, HU ;
BREMERT, O .
APPLIED PHYSICS LETTERS, 1993, 62 (19) :2341-2343
[9]   LASER DEPOSITION OF METALLIC ALLOYS AND MULTILAYERS [J].
KREBS, HU ;
FAHLER, S ;
BREMERT, O .
APPLIED SURFACE SCIENCE, 1995, 86 (1-4) :86-89
[10]   PULSED-LASER DEPOSITION OF METAL AND METAL MULTILAYER FILMS [J].
LUNNEY, JG .
APPLIED SURFACE SCIENCE, 1995, 86 (1-4) :79-85