Recent progress in SFQ device technologies in Japan

Recent progress in single flux quantum (SFQ) device technologies in Japan is,described, mainly focusing on those developed in the NEDO "Superconductors Network Device Project" which includes developments of both LTS and HTS devices. The advanced Nb process which consists of a planarized structure with nine Nb layers and 10 kA/cm(2) Josephson junctions (JJs) has been developed. This enables fabrication of chips including 100,000 JJs and operating frequency up to 80 GHz. We have also developed the CAD tool by which one can generate SFQ circuit layouts including about 400,000 JJs from logic descriptions. For demonstration of a small-scale switch system, a 4 x 4 switch chip, a 117 Gbps multichip-module (MCM) technology, and a packaging technology with 32-ch 10 Gbps I/Os to an MCM have been developed. By using the multilayer process with three HTS epitaxial layers and interface-engineered ramp-edge JJs, we demonstrated operation of SFQ circuits with up to 200 JJs. A variety of elementary SFQ circuits such as a T-FF and a 1:2 switch required for an A/D converter front-en circuit have been designed based on a new layout method, and their operation at 30-50 K has been confirmed. A prototype sampler system is being developed for demonstration of bandwidth over 100 GHz for optical input signals.