Optimization of dynamic shear force measurement for fiber wobbling method

被引：14

作者：

Itoh, S ^{[1
]}

Fukuzawa, K ^{[1
]}

Takahashi, K ^{[1
]}

Ando, T ^{[1
]}

Zhang, H ^{[1
]}

Mitsuya, Y ^{[1
]}

机构：

[1] Nagoya Univ, Dept Microsyst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2005年 / 11卷 / 8-10期

关键词：

Objective Lens; Laser Spot; High Shear Rate; Differential Signal; Spherical Aberration;

D O I：

10.1007/s00542-005-0568-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Fiber wobbling method can be used to study nanotribological properties of a head disk interface. It can measure 1 nN shear force at a high shear rate. In this study, an optical system for the shear force measurement was optimized considering the spherical aberration of a sphere lens and the saturation of the position sensitive detector, and the minimum shear force detection limit of sub-nano-newton has been achieved.

引用

页码：894 / 900

页数：7