SYSTEM-LEVEL CHARACTERIZATION OF BIAS NOISE EFFECTS ON ELECTROSTATIC RF MEMS TUNABLE FILTERS

被引：0
|
作者：
Liu, Xiaoguang [1 ]
Chen, Kenle [1 ]
Katehi, Linda P. B.
Chappell, William J. [1 ]
Peroulis, Dimitrios
机构：
[1] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA
来源：
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2011年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the first system-level characterization of the effects of bias noise on the performance of high-Q electrostatic RF MEMS tunable filters. By looking at the system-level performance of such a tunable filter, this paper shows that bias noise, if not well controlled, can degrade the RF performance of the tunable filter. Quantified by error vector magnitude measurement, such system level degradation due to bias noise is found to be dependent on the frequency and amplitude of the noise signals.
引用
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页码：797 / 800
页数：4
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