Analysis of longitudinal leaky surface acoustic waves on LiNbO3/amorphous layer/quartz structure

被引：19

作者：

Asakawa, Shiori ^{[1
]}

Hayashi, Junki ^{[1
]}

Suzuki, Masashi ^{[1
]}

Kakio, Shoji ^{[1
]}

Tezuka, Ami ^{[2
]}

Kuwae, Hiroyuki ^{[2
]}

Yokota, Hiroaki ^{[3
]}

Yonai, Toshifumi ^{[3
]}

Kishida, Kazuhito ^{[3
]}

Mizuno, Jun ^{[2
]}

机构：

[1] Univ Yamanashi, Integrated Grad Sch Med Engn & Agr Sci, Kofu, Yamanashi 4008511, Japan

[2] Waseda Univ, Res Org Nano & Life Innovat, Shinjuku Ku, Tokyo 1620041, Japan

[3] Japan Steel Works Ltd, Shinagawa Ku, Tokyo 1410032, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2020年 / 59卷 / SK期

关键词：

ACCURATE MEASUREMENTS; PHYSICAL CONSTANTS; SUBSTRATE; LINBO3;

D O I：

10.35848/1347-4065/ab8c9d

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Recently, bonded structures comprising a quartz substrate and a LiNbO3 (LN) or LiTaO3 thin-plate have been attracting attention as a means of obtaining enhanced properties for surface acoustic wave (SAW) devices. It was reported that the bonding strength was extremely improved by utilizing an amorphous thin film as a middle layer. In this research, the propagation and resonance characteristics of longitudinal leaky SAWs on an amorphous layer inserted to the boundary between an X-cut 36 degrees Y-propagating LN (X36 degrees Y-LN) and X35 degrees Y-quartz were investigated. For the metallized surface of an X36 degrees Y-LN/Al2O3/X35 degrees Y-quartz structure, an attenuation of 0.0001 dB /lambda was obtained at an LT thin-plate thickness of 0.072 lambda (lambda: wavelength), which was better than that of an X36 degrees Y-LN/X35 degrees Y-quartz structure. Utilizing a finite element method, we found that the admittance ratio and Q factor for the X36 degrees Y-LN/Al2O3/X35 degrees Y-quartz model were improved owing to the reduction of the leakage due to the shear-vertical particle displacement. (C) 2020 The Japan Society of Applied Physics.

引用

页数：5

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