Self-diffusion in crystalline silicon: A Car-Parrinello molecular dynamics study

被引:9
作者
Koizumi, Kenichi [1 ]
Boero, Mauro [2 ,3 ]
Shigeta, Yasuteru [4 ]
Oshiyama, Atsushi [1 ]
机构
[1] Univ Tokyo, Dept Appl Phys, Bunkyo Ku, Tokyo 1138656, Japan
[2] CNRS, UMR 7504, Inst Phys & Chim Mat Strasbourg, F-67034 Strasbourg 2, France
[3] Univ Strasbourg, F-67034 Strasbourg 2, France
[4] Osaka Univ, Grad Sch Engn Sci, Dept Mat Engn Sci, Osaka 5608531, Japan
关键词
POINT-DEFECTS; CONCERTED EXCHANGE; VACANCY; APPROXIMATION; MIGRATION; MODEL;
D O I
10.1103/PhysRevB.84.205203
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report detailed atomistic calculations within the local density approximation (LDA) and the generalized gradient approximation (GGA) in density functional theory to clarify microscopic mechanisms and obtain the corresponding diffusion constant for self-diffusion in crystalline Si. The formation free energies of intrinsic defects, which mediate the self-diffusion, are calculated by accurate total-energy static calculations. Diffusivity in each mechanism is obtained from the mean-square displacements computed through Car-Parrinello molecular dynamics for a simulation time long enough to allow for these relatively slow phenomena to occur. We find that the interstitial mechanism dominantly contributes to the self-diffusion: The self-diffusion constant via the interstitial mechanism is found to be larger than that via the vacancy mechanism by about two orders of magnitude in LDA. We also find that the calculated formation free energies and migration energies in GGA are larger than the corresponding ones in LDA. Due to this, GGA substantially improves the free-energy landscape, thus providing diffusion constants in quantitative agreement with the experimental values over a whole temperature range. Atomistic processes in the self-diffusion are also clarified.
引用
收藏
页数:10
相关论文
共 45 条
  • [21] Calculations of silicon self-interstitial defects
    Leung, WK
    Needs, RJ
    Rajagopal, G
    Itoh, S
    Ihara, S
    [J]. PHYSICAL REVIEW LETTERS, 1999, 83 (12) : 2351 - 2354
  • [22] Ab initio study of self-diffusion in silicon over a wide temperature range: Point defect states and migration mechanisms
    Ma, Shangyi
    Wang, Shaoqing
    [J]. PHYSICAL REVIEW B, 2010, 81 (19)
  • [23] NOSE-HOOVER CHAINS - THE CANONICAL ENSEMBLE VIA CONTINUOUS DYNAMICS
    MARTYNA, GJ
    KLEIN, ML
    TUCKERMAN, M
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1992, 97 (04) : 2635 - 2643
  • [24] Defect migration in crystalline silicon
    Munro, LJ
    Wales, DJ
    [J]. PHYSICAL REVIEW B, 1999, 59 (06): : 3969 - 3980
  • [25] Self-diffusion in intrinsic and extrinsic silicon using isotopically pure 30silicon/natural silicon heterostructures
    Nakabayashi, Y
    Osman, HI
    Toyonaga, K
    Yokota, K
    Matsumoto, S
    Murota, J
    Wada, K
    Abe, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (6A): : 3304 - 3310
  • [26] A UNIFIED FORMULATION OF THE CONSTANT TEMPERATURE MOLECULAR-DYNAMICS METHODS
    NOSE, S
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (01) : 511 - 519
  • [27] Nose S., 1984, MOL PHYS, V52, P511
  • [28] DIFFUSION WITHOUT VACANCIES OR INTERSTITIALS - A NEW CONCERTED EXCHANGE MECHANISM
    PANDEY, KC
    [J]. PHYSICAL REVIEW LETTERS, 1986, 57 (18) : 2287 - 2290
  • [29] ENTROPY CALCULATION BEYOND THE HARMONIC APPROXIMATION - APPLICATION TO DIFFUSION BY CONCERTED EXCHANGE IN SI
    PANDEY, KC
    KAXIRAS, E
    [J]. PHYSICAL REVIEW LETTERS, 1991, 66 (07) : 915 - 918
  • [30] THEORY OF ELECTRONICALLY STIMULATED DEFECT MIGRATION IN SEMICONDUCTORS
    PANTELIDES, ST
    OSHIYAMA, A
    CAR, R
    KELLY, PJ
    [J]. PHYSICAL REVIEW B, 1984, 30 (04): : 2260 - 2262