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Spatial resolution and information transfer in scanning transmission electron microscopy
被引:24
|作者:
Peng, Yiping
[1
]
Oxley, Mark P.
[1
]
Lupini, Andrew R.
[1
]
Chisholm, Matthew F.
[1
]
Pennycook, Stephen J.
[1
]
机构:
[1] Oak Ridge Natl Lab, Mat Sci & Technol Div, Oak Ridge, TN 37831 USA
关键词:
ADF;
STEM;
resolution;
information transfer;
noise;
defocus;
thickness;
detector inner angle;
D O I:
10.1017/S1431927608080161
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
The relation between image resolution and information transfer is explored. It is shown that the existence of higher frequency transfer in the image is just a necessary but not sufficient condition for the achievement of higher resolution. Adopting a two-point resolution criterion, we suggest that a 10% contrast level between two features in an image should be used as a practical definition of resolution. in the context of scanning transmission electron microscopy, it is shown that the channeling effect does not have a direct connection with image resolution because sharp channeling peaks do not move with the scanning probe. Through a quantitative comparison between experimental image and simulation, a Fourier-space approach is proposed to estimate defocus and sample thickness. The effective atom size in Z-contrast imaging depends on the annular detector's inner angle. Therefore, an optimum angle exists for the highest resolution as a trade-off between reduced atom size and reduced signal with limited information transfer due to noise.
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页码:36 / 47
页数:12
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