Transmission spectra modeling for nanomultilayer chalcogenide thin films

被引：0

作者：

Meshalkin, Alexei ^{[1
]}

Paiuk, Oleksandr ^{[2
]}

Achimova, Elena ^{[1
]}

Stronski, Alexander ^{[2
]}

机构：

[1] Moldavian Acad Sci, Inst Appl Phys, Kishinev, Moldova

[2] NAS Ukraine, V Lashkaryov Inst Semicond Phys, Kiev, Ukraine

来源：

ADVANCED TOPICS IN OPTOELECTRONICS, MICROELECTRONICS, AND NANOTECHNOLOGIES IX | 2018年 / 10977卷

基金：

欧盟地平线“2020”;

关键词：

Transmission spectra; numerical simulation; chalcogenide glasses; nanomultilayer structure; optical constants; absorption coefficient; SURFACE-RELIEF FORMATION; OPTICAL-CONSTANTS; REFRACTIVE-INDEX; THICKNESS; GLASSES;

D O I：

10.1117/12.2324795

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An curve-fitting method for accurate determination of optical constants and thickness is presented for chalcogenide glasses thin films. Optical constants and thickness of nanomultilayer chalcogenide structure As2S3:Mn-Se were obtained by Swanepoel method from transmission spectrum using PARAV software. Proposed curve-fitting method is based on numerical simulation of transmission spectrum based on film parameters obtained by Swanepoel method and comparison one with experimental transmission spectrum. It is shown that modeled spectrum is not fully corresponding to the original measured spectrum due to inaccurate absorption coefficient determination in the region of Urbach absorption. Adjusting of absorption spectrum with further numerical simulation of spectrum allows achieving the best correspondence to original transmission spectrum. It solves the problem of the accurate absorption coefficient calculation in the different absorption regions. Finally, dependencies of the absorption coefficient on wavelength of the nanomultilayer chalcogenide films structures were obtained from transmission spectra using the proposed method.

引用

页数：7

共 25 条

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