Transfer of preheat-treated SnO2 via a sacrificial bridge-type ZnO layer for ethanol gas sensor

被引：13

作者：

Lee, Da Hoon ^{[1
]}

Kang, Sun Kil ^{[2
]}

Pak, Yusin ^{[1
]}

Lim, Namsoo ^{[1
]}

Lee, Ryeri ^{[1
]}

Kumaresan, Yogeenth ^{[1
]}

Lee, Sungeun ^{[2
]}

Lee, Chaedeok ^{[2
]}

Ham, Moon-Ho ^{[1
]}

Jung, Gun Young ^{[1
]}

机构：

[1] Gwangju Inst Sci & Technol, Sch Mat Sci & Engn, 261 Cheomdan Gwagiro, Gwangju 500712, South Korea

[2] LG Elect, Mat & Prod Engn Res Inst Div, Sensor Solut Lab, Woomyeon R&D Campus,38 Baumoe Ro, Seoul 06763, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2018年 / 255卷

基金：

新加坡国家研究基金会;

关键词：

Bridge-type ZnO layer; Preheating of SnO2 sensing layer; Gas sensor; Transfer; SENSING THIN-FILMS; FLEX PACKAGES; FLIP-CHIP; METAL; NANOPARTICLES; SENSITIVITY; PERFORMANCE; HEATER; FABRICATION; PARAMETERS;

D O I：

10.1016/j.snb.2017.08.025

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The progress in developing the microelectromechanical system (MEMS) heater-based SnO2 gas sensors was hindered by the subsequent heat treatment of the tin oxide (SnO2), nevertheless it is required to obtain excellent sensor characteristics. During the sintering process, the MEMS heater and the contact electrodes can be degraded at such a high temperature, which could reduce the sensor response and reliability. In this research, we presented a process of preheating the printed SnO2 sensing layer on top of a sacrificial bridge-type ZnO layer at such a high temperature, followed by transferring it onto the contact electrodes of sensor device by selective etching of the sacrificial ZnO layer. Therefore, the sensor device was not exposed to the high sintering temperature. The SnO2 gas sensor fabricated by the transfer process exhibited a rectangular sensing curve behavior with a rapid response of 52 s at 20 ppm ethanol concentration. In addition, reliable and repeatable sensing characteristics were obtained even at an ethanol gas concentration of 5 ppm. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：70 / 77

页数：8

共 47 条

[1] Nerve agent simulant detection by solidly mounted resonators (SMRs) polymer coated using laser induced forward transfer (LIFT) technique [J].