Detection of defects buried in metallic samples by scanning microwave microscopy

被引:77
作者
Plassard, C. [1 ]
Bourillot, E. [1 ]
Rossignol, J. [1 ]
Lacroute, Y. [1 ]
Lepleux, E. [2 ]
Pacheco, L. [2 ]
Lesniewska, E. [1 ]
机构
[1] CNRS Univ Bourgogne, UMR CNRS 5209, Inst Carnot Bourgogne, F-21078 Dijon, France
[2] ScienTec, F-91952 Les Ulis, France
关键词
TUNNELING MICROSCOPE; REFRACTIVE-INDEX; FIELD; SURFACE; ZONE; TIP;
D O I
10.1103/PhysRevB.83.121409
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper reports the local detection of buried calibrated metal defects in metal samples by a new experimental technique, scanning microwave microscopy. This technique combines the electromagnetic measurement capabilities of a microwave vector network analyzer with the subnanometer-resolution capabilities of an atomic force microscope. The network analyzer authorizes the use of several frequencies in the range 1-6 GHz, allowing three-dimensional tomographical investigation, which is useful for the detection of bulk defects in metal materials.
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页数:4
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