Superlattice formation of (Ba,Sr)TiO3 prepared by metal-organic chemical vapor deposition

被引:6
|
作者
Yoo, DC [1 ]
Lee, JY [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
关键词
superlattice; (Ba; Sr)TiO3; perovskite; ferroelectrics; high-resolution transmission electron microscopy; selected area electron diffraction pattern; metal-organic chemical vapor deposition;
D O I
10.1016/S0167-577X(00)00244-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Dielectric superlattices of (Ba0.5Sr0.5)TiO3 (BST) grown by a metal-organic chemical vapor deposition (MOCVD) have been studied by transmission electron microscopy (TEM). A selected area of electron diffraction patterns clearly show satellite spots that indicate the formation of superlattice of BST film. A superlattice distance is 6.75 Angstrom, that is, 2.4 times of (110) BST plans distance. A high-resolution TEM study revealed that the superlattices were induced by the periodic composition modulation of Ba and Sr atoms. A possible atomic arrangement model of the superlattice was proposed by a simulation with a national center for electron microscopy simulation system (NCEMSS). (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:258 / 261
页数:4
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