Structural and optical properties of Er2O3 films

被引:17
|
作者
Zhu Yanyan [1 ]
Fang Zebo [2 ]
Liu Yongsheng [1 ]
机构
[1] Shanghai Univ Elect Power, Dept Math & Phys, Shanghai 200090, Peoples R China
[2] Fudan Univ, Surface Phys Lab, Natl Key Lab, Shanghai 200433, Peoples R China
基金
中国国家自然科学基金;
关键词
optical constants; rare earth oxides; solar cells; RARE-EARTH-OXIDES;
D O I
10.1016/S1002-0721(09)60194-0
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
Stoichiometric and amorphous Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron technique. Spectroscopic ellipsometry measurement showed that the refractive index of the Er2O3 film in wavelength region of 400-1000 nm was between 1.6-1.7. The reflectivity of the Er2O3 films decreased greatly with respect to that from the uncoated Si substrates. The absorption coefficient of the Er2O3 film indicated that it had an energy gap larger than 4.5 eV. The obtained characteristics indicated that Er2O3 films could be promising candidates for anti-reflection coatings in solar cells.
引用
收藏
页码:752 / 755
页数:4
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