A novel design of band-stop filter using MEMS and Electromagnetic Band-gap (EBG) technology

被引：0
|
作者：
Guo, H. [1 ]
Huang, J. M. [1 ]
Deng, Z. L. [1 ]
机构：
[1] Beijing Univ Posts & Telecommun, Sch Elect Engn, Beijing 100876, Peoples R China
来源：
ISTM/2007: 7TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-7, CONFERENCE PROCEEDINGS | 2007年
关键词：
microelectromechanical systems (MEMS); Electromagnetic Band-gap (EBG); band-stop filter; surface micromachining process;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A novel type of Electromagnetic Band-gap (EBG) band-stop filter and its equivalent model is proposed in this paper. EBG unit cell equivalent circuit model is derived using electromagnetic field theorem. The EBG cells were cascaded to form a band-stop filter, which was fabricated and measured. The fabrication is carried on high resistivity silicon substrate using microelectromechanical. systems (MEMS) surface micromachining process. The measurement result reveals a 20 dB stop-band that has a bandwidth of 13.2 GHz. The insertion losses for the lower pass-band and the higher pass-band are less than 2 dB and below 4.5 dB respectively. a high potential is possessed for the EBG band-stop filter to be integrated with CMOS compatible devices.
引用
收藏
页码：4991 / 4993
页数：3
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