Impact Ionization Coefficients in 4H-SiC by Ultralow Excess Noise Measurement

被引:15
作者
Green, James E. [1 ]
Loh, Wei Sun
Marshall, Andrew R. J. [2 ]
Ng, Beng Koon [3 ]
Tozer, Richard C. [1 ]
David, John P. R. [1 ]
Soloviev, Stanislav I. [4 ]
Sandvik, Peter M. [4 ]
机构
[1] Univ Sheffield, Dept Elect & Elect Engn, Sheffield S1 3JD, S Yorkshire, England
[2] Univ Lancaster, Dept Phys, Lancaster LA1 4YB, England
[3] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
[4] GE Global Res Ctr, Semicond Technol Lab, Niskayuna, NY 12309 USA
关键词
Avalanche multiplication; avalanche photodiode (APD); excess noise; impact ionization; local model; 4H-SiC; 4H SILICON-CARBIDE; AVALANCHE PHOTODIODES; ABSORPTION; DEVICES;
D O I
10.1109/TED.2012.2185499
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Photomultiplication and excess noise measurements have been undertaken on two 4H-SiC avalanche photodiodes (APDs) using 244-nm light and 325-nm light. The structures are APDs with separate absorption and multiplication regions having multiplication regions of 2.74 and 0.58 mu m, respectively. Pure injection conditions in the thicker device permit the measurement of pure-hole-initiated photomultiplication and an excess noise factor. Ionization coefficients for both carrier types have been extracted from these data using a local model. The use of the excess noise factor to infer the value of the less readily ionizing coefficient alpha from pure hole injection measurements is more robust than direct extraction from mixed injection measurements. This is because mixed injection introduces uncertainty in the generation profile. We report a significant reduction of the electron ionization coefficient a at low fields. The more readily ionizing hole coefficient beta remains very similar to prior work.
引用
收藏
页码:1030 / 1036
页数:7
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