Achromatic and high-resolution full-field X-ray microscopy based on total-reflection mirrors

被引：17

作者：

Matsuyama, Satoshi ^{[1
]}

Emi, Yoji ^{[1
]}

Kino, Hidetoshi ^{[1
]}

Kohmura, Yoshiki ^{[2
]}

Yabashi, Makina ^{[2
]}

Ishikawa, Tetsuya ^{[2
]}

Yamauchi, Kazuto ^{[1
,3
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Precis Sci & Technol, Suita, Osaka 5650871, Japan

[2] RIKEN SPring 8 Ctr, Sayo, Hyogo 6795148, Japan

[3] Osaka Univ, Grad Sch Engn, Res Ctr Ultra Precis Sci & Technol, Suita, Osaka 5650871, Japan

来源：

OPTICS EXPRESS | 2015年 / 23卷 / 08期

关键词：

SPATIAL-RESOLUTION; ZONE PLATES; OPTICS; NM; INTERFEROMETRY;

D O I：

10.1364/OE.23.009746

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We developed an achromatic and high-resolution full-field X-ray microscope based on advanced Kirkpatrick-Baez mirror optics that comprises two pairs of elliptical mirrors and hyperbolic mirrors utilizing the total reflection of X-rays. Performance tests to investigate the spatial resolution and chromatic aberration were performed at SPring-8. The microscope clearly resolved the pattern with similar to 100-nm feature size. Imaging the pattern by changing the X-ray energy revealed achromatism in the wide energy range of 8-11 keV. (C) 2015 Optical Society of America

引用

页码：9746 / 9752

页数：7

共 21 条

[1]

Born M., 1999, PRINCIPLES OPTICS

[2] Soft 20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures [J].

Chao, WL ;

Anderson, E ;

Denbeaux, GP ;

Harteneck, B ;

Liddle, JA ;

Olynick, DL ;

Pearson, AL ;

Salmassi, F ;

Song, CY ;

Attwood, DT .

OPTICS LETTERS, 2003, 28 (21) :2019-2021

[3] Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm [J].

Chen, Tsung-Yu ;

Chen, Yu-Tung ;

Wang, Cheng-Liang ;

Kempson, Ivan M. ;

Lee, Wah-Keat ;

Chu, Yong S. ;

Hwu, Y. ;

Margaritondo, G. .

OPTICS EXPRESS, 2011, 19 (21) :19919-19924

[4] Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope [J].

Hoshino, Masato ;

Ishino, Toyoaki ;

Namiki, Takashi ;

Yamada, Norimitsu ;

Watanabe, Norio ;

Aoki, Sadao .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (07)

[5] FORMATION OF OPTICAL IMAGES BY X-RAYS [J].

KIRKPATRICK, P ;

BAEZ, AV .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1948, 38 (09) :766-774

[6] Development of an advanced Kirkpatrick-Baez microscope [J].

Kodama, R ;

Ikeda, N ;

Kato, Y ;

Katori, Y ;

Iwai, T ;

Takeshi, K .

OPTICS LETTERS, 1996, 21 (17) :1321-1323

[7] High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments [J].

Kohmura, Y ;

Okada, K ;

Takeuchi, A ;

Takano, H ;

Suzuki, Y ;

Ishikawa, T ;

Ohigashi, T ;

Yokosuka, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2001, 467 :881-883

[8] Development of achromatic full-field X-ray microscopy with compact imaging mirror system [J].

Matsuyama, S. ;

Emi, Y. ;

Kino, H. ;

Sano, Y. ;

Kohmura, Y. ;

Tamasaku, K. ;

Yabashi, M. ;

Ishikawa, T. ;

Yamauchi, K. .

X-RAY NANOIMAGING: INSTRUMENTS AND METHODS, 2013, 8851

[9] Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors [J].

Matsuyama, S. ;

Emi, Y. ;

Kohmura, Y. ;

Tamasaku, K. ;

Yabashi, M. ;

Ishikawa, T. ;

Yamauchi, K. .

11TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY (XRM2012), 2013, 463

[10] One-dimensional Wolter optics with a sub-50 nm spatial resolution [J].

Matsuyama, S. ;

Wakioka, T. ;

Kidani, N. ;

Kimura, T. ;

Mimura, H. ;

Sano, Y. ;

Nishino, Y. ;

Yabashi, M. ;

Tamasaku, K. ;

Ishikawa, T. ;

Yamauchi, K. .

OPTICS LETTERS, 2010, 35 (21) :3583-3585

← 1 2 3 →