A Digital Output Accelerometer Using MEMS-based Piezoelectric Accelerometer Connected to Parallel CMOS Circuit

被引：3
|
作者：
Kobayashi, Takeshi [1 ,3 ]
Okada, Hironao [1 ,3 ]
Masuda, Takashi [2 ,3 ]
Maeda, Ryutaro [1 ]
Itoh, Toshihiro [1 ,3 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Tsukuba 3058564, Japan
[2] Univ Tokyo, Tokyo 1138654, Japan
[3] JST CREST, Tokyo 1020075, Japan
来源：
EUROSENSORS XXIV CONFERENCE | 2010年 / 5卷
基金：
日本科学技术振兴机构;
关键词：
Wireless sensor network; MEMS; Digital output; Piezoelectric accelerometer; PZT;
D O I：
10.1016/j.proeng.2010.09.295
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
We have developed digital output accelerometers composed of MEMS-based peizoelectric accelerometers and parallel CMOS inverts accompanied by capacitors with different capacitance. The digital output accelerometer was vibrated at acceleration range 0-10 m/s(2). The number of on-state CMOS inverter has increased with acceleration. Assuming that the on-state and off-state of CMOS inverters are "1" and "0", the present digital output accelerometers convert acceleration range of <1.0, 1.0-2.5, 2.5-5.0 and >5 m/s(2) into digital output of "000", "001", "011", and "111", respectively. (C) 2010 Published by Elsevier Ltd.
引用
收藏
页码：1071 / 1074
页数：4
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