A Digital Output Accelerometer Using MEMS-based Piezoelectric Accelerometer Connected to Parallel CMOS Circuit

被引：3

作者：

Kobayashi, Takeshi ^{[1
,3
]}

Okada, Hironao ^{[1
,3
]}

Masuda, Takashi ^{[2
,3
]}

Maeda, Ryutaro ^{[1
]}

Itoh, Toshihiro ^{[1
,3
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Tsukuba 3058564, Japan

[2] Univ Tokyo, Tokyo 1138654, Japan

[3] JST CREST, Tokyo 1020075, Japan

来源：

EUROSENSORS XXIV CONFERENCE | 2010年 / 5卷

基金：

日本科学技术振兴机构;

关键词：

Wireless sensor network; MEMS; Digital output; Piezoelectric accelerometer; PZT;

D O I：

10.1016/j.proeng.2010.09.295

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We have developed digital output accelerometers composed of MEMS-based peizoelectric accelerometers and parallel CMOS inverts accompanied by capacitors with different capacitance. The digital output accelerometer was vibrated at acceleration range 0-10 m/s(2). The number of on-state CMOS inverter has increased with acceleration. Assuming that the on-state and off-state of CMOS inverters are "1" and "0", the present digital output accelerometers convert acceleration range of <1.0, 1.0-2.5, 2.5-5.0 and >5 m/s(2) into digital output of "000", "001", "011", and "111", respectively. (C) 2010 Published by Elsevier Ltd.

引用

页码：1071 / 1074

页数：4

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