Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition

被引：156

作者：

Qin, LC

Zhou, D

Krauss, AR

Gruen, DM

机构：

[1] Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA

[2] Argonne Natl Lab, Div Chem, Argonne, IL 60439 USA

来源：

APPLIED PHYSICS LETTERS | 1998年 / 72卷 / 26期

关键词：

D O I：

10.1063/1.121658

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A processing route has been developed to grow bundles of carbon nanotubes on substrates from methane and hydrogen mixtures by microwave plasma-enhanced chemical vapor deposition, catalyzed by iron particles reduced from ferric nitrate. Growth takes place at about 900 degrees C leading to nanotubes with lengths of more than 20 mu m and diameters on the nanometer scale. (C) 1998 American Institute of Physics.

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页码：3437 / 3439

页数：3

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