The characteristics of atmospheric radio frequency discharges with frequency increasing at a constant power density

被引:40
作者
Zhang, Yuan Tao [1 ]
Li, Qing Quan [1 ]
Lou, Jie [1 ]
Li, Qing Min [1 ]
机构
[1] Shandong Univ, Sch Elect Engn, Jinan 250061, Shandong, Peoples R China
关键词
GLOW-DISCHARGES;
D O I
10.1063/1.3496474
中图分类号
O59 [应用物理学];
学科分类号
摘要
A computational model is used to investigate the characteristics of atmospheric radio frequency discharges by increasing frequency from 20 to 100 MHz at a constant power density. The simulation results show that increasing frequency can effectively enhance electron density before the transition frequency but after it the ignition is quenched then the electron density decreases. However this simulation also indicates the maximum time-averaged electron energy reduces monotonically with the excitation frequency increasing at a constant power density. (C) 2010 American Institute of Physics. [doi:10.1063/1.3496474]
引用
收藏
页数:3
相关论文
共 15 条
[1]   Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition [J].
Ahn, S. K. ;
You, S. J. ;
Chang, H. Y. .
APPLIED PHYSICS LETTERS, 2006, 89 (16)
[2]   Frequency variation under constant power conditions in hydrogen radio frequency discharges [J].
Amanatides, E ;
Mataras, D .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (03) :1556-1566
[3]   On the stability of a homogeneous barrier discharge in nitrogen relative to radial perturbations [J].
Golubovskii, YB ;
Maiorov, VA ;
Behnke, J ;
Behnke, JF .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2003, 36 (08) :975-981
[4]   Comparison of fluid and particle-in-cell simulations on atmospheric pressure helium microdischarges [J].
Hong, Y. J. ;
Yoon, M. ;
Iza, F. ;
Kim, G. C. ;
Lee, J. K. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2008, 41 (24)
[5]   Electron trapping in radio-frequency atmospheric-pressure glow discharges [J].
Liu, D. W. ;
Shi, J. J. ;
Kong, M. G. .
APPLIED PHYSICS LETTERS, 2007, 90 (04)
[6]   Driving frequency effects on the characteristics of atmospheric pressure capacitive helium discharge [J].
Moon, Se Youn ;
Kim, D. B. ;
Gweon, B. ;
Choe, W. .
APPLIED PHYSICS LETTERS, 2008, 93 (22)
[7]   Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source [J].
Park, J ;
Henins, I ;
Herrmann, HW ;
Selwyn, GS ;
Hicks, RF .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (01) :20-28
[8]  
Roth JR, 1995, IND PLASMA ENG PRINC, V1
[9]   Expansion of the plasma stability range in radio-frequency atmospheric-pressure glow discharges [J].
Shi, JJ ;
Kong, MG .
APPLIED PHYSICS LETTERS, 2005, 87 (20) :1-3
[10]   CAPACITIVELY COUPLED GLOW-DISCHARGES AT FREQUENCIES ABOVE 13.56 MHZ [J].
SURENDRA, M ;
GRAVES, DB .
APPLIED PHYSICS LETTERS, 1991, 59 (17) :2091-2093