Rapid high-resolution X-ray diffraction measurement and analysis of MOVPE pHEMT structures using a high-brilliance X-ray source and automatic pattern fitting

A novel micro-focus X-ray tube in combination with a focusing optic that uses total external reflection has been used to enhance the diffracted intensity in a double-crystal experiment, whilst simultaneously reducing the beam footprint on the sample. The increased intensity allows data to be collected more quickly. Advances in auto-fitting using the full dynamical theory of X-ray diffraction mean that sample material parameters can be extracted quickly and objectively, opening the way to automatic data analysis. Both features are attractive for non-destructive quality control of semiconductor device structures, as well as for process development and research purposes. (C) 2000 Elsevier Science B.V. All rights reserved.