Hall Sensors for Extreme Temperatures

被引:45
作者
Jankowski, Jakub [1 ]
El-Ahmar, Semir [1 ]
Oszwaldowski, Maciej [1 ]
机构
[1] Poznan Univ Tech, Inst Phys, PL-61965 Poznan, Poland
关键词
Hall sensors; n-InSb/GaAs; extreme temperatures; magnetic sensors; HETEROSTRUCTURES; INSB;
D O I
10.3390/s110100876
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We report on the preparation of the first complete extreme temperature Hall sensor. This means that the extreme-temperature magnetic sensitive semiconductor structure is built-in an extreme-temperature package especially designed for that purpose. The working temperature range of the sensor extends from -270 degrees C to +300 degrees C. The extreme-temperature Hall-sensor active element is a heavily n-doped InSb layer epitaxially grown on GaAs. The magnetic sensitivity of the sensor is ca. 100 mV/T and its temperature coefficient is less than 0.04 %/K. This sensor may find applications in the car, aircraft, spacecraft, military and oil and gas industries.
引用
收藏
页码:876 / 885
页数:10
相关论文
共 20 条
[1]   High quality Hall sensors made of heavily doped n-InSb epitaxial films [J].
Berus, T ;
Oszwaldowski, M ;
Grabowski, J .
SENSORS AND ACTUATORS A-PHYSICAL, 2004, 116 (01) :75-78
[2]   Investigation of AlGaN/AlN/GaN heterostructures for magnetic sensor application from liquid helium temperature to 300 °C [J].
Bouguen, L. ;
Contreras, S. ;
Jouault, B. ;
Konczewicz, L. ;
Camassel, J. ;
Cordier, Y. ;
Azize, M. ;
Chenot, S. ;
Baron, N. .
APPLIED PHYSICS LETTERS, 2008, 92 (04)
[3]   High temperature behaviour of AlGaN/AlN/GaN Hall-FET sensors [J].
Bouguen, L. ;
Konczewicz, L. ;
Contreras, S. ;
Jouault, B. ;
Camassel, J. ;
Cordier, Y. .
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2009, 165 (1-2) :1-4
[4]  
*COMM MAT HIGH TEM, 1995, MAT HIGH TEMP SEM DE
[5]   High temperature electrical investigations of (AI,Ga)N/GaN heterostructures - Hall sensor applications [J].
Consejo, C ;
Contreras, S ;
Konczewicz, L ;
Lorenzini, P ;
Cordier, Y ;
Skierbiszewski, C ;
Robert, JL .
PHYSICA STATUS SOLIDI C - CONFERENCES AND CRITICAL REVIEWS, VOL 2, NO 4, 2005, 2 (04) :1438-1443
[6]   High-temperature performance of AlGaN/GaN HFETs and MOSHFETs [J].
Donoval, D. ;
Florovic, M. ;
Gregusova, D. ;
Kovac, J. ;
Kordos, P. .
MICROELECTRONICS RELIABILITY, 2008, 48 (10) :1669-1672
[7]  
ELAHMAR S, 2009, ELEKTRONIKA, V1, P72
[8]  
FRICKE K, 1995, HIGH TEMPERATURE ELE
[9]  
Kirschman R., 1999, HIGH TEMPERATURE ELE
[10]  
KOVARIK K, 2011, J NUCL MAT IN PRESS