Resonant Raman characterisation of ultra-thin nano-protective carbon layers for magnetic storage devices

被引:35
作者
von Gradowski, M
Ferrari, AC
Ohr, R
Jacoby, B
Hilgers, H
Schneider, HH
Adrian, H
机构
[1] IBM STD Germany, D-55131 Mainz, Germany
[2] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
[3] Johannes Gutenberg Univ Mainz, Dept Phys, D-55099 Mainz, Germany
关键词
carbon thin films; Raman spectroscopy; protective coatings;
D O I
10.1016/S0257-8972(03)00602-9
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Carbon thin films are very important as protective coatings for a wide range of applications such as magnetic storage devices. The key parameter of interest is the spa fraction, since it controls the mechanical properties of the film. Visible Raman spectroscopy is a very popular technique to determine the carbon bonding. However, the visible Raman spectra mainly depend on the configuration and clustering of the sp(2) sites. This can result in the Raman spectra of different samples looking similar albeit having a different structure. Thus, visible Raman alone cannot be used to derive the spa content. Here we monitor the carbon bonding by using a combined study of Raman spectra taken at two wavelengths (514 and 244 nm). We show how the G peak dispersion is a very useful parameter to investigate the carbon samples and we endorse it as a production-line characterisation tool. The dispersion is proportional to the degree of disorder, thus making it possible to distinguish between graphitic and diamond-like carbon. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:246 / 252
页数:7
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