Synthesis of fluorinated α-sila-β-diketones and their copper(II) complexes

被引：19

作者：

Higashiya, S ^{[1
]}

Banger, KK ^{[1
]}

Ngo, SC ^{[1
]}

Lim, PN ^{[1
]}

Toscano, PJ ^{[1
]}

Welch, JT ^{[1
]}

机构：

[1] SUNY Albany, Dept Chem, Albany, NY 12222 USA

来源：

INORGANICA CHIMICA ACTA | 2003年 / 351卷

关键词：

sila-beta-diketone; copper complexes; volatile complexes; thermal analyses; crystal structure; chemical vapor deposition;

D O I：

10.1016/S0020-1693(03)00115-4

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

Fluorinated alpha-sila-beta-diketones, synthesized in good yields via the Claisen condensation of the esters of fluorinated acids or fluorinated acid fluorides and the lithium enolates of acetyltrialkylsilanes, were employed in the preparation of volatile copper complexes for copper metallization. The thermal properties of the corresponding copper(II) complexes were determined by TGA and DSC to evaluate the potential of these materials as copper metal-organic chemical vapor deposition (MOCVD) precursors; the new copper compounds have greater volatility and stability than the corresponding copper complexes of non-fluorinated alpha-sila-beta-diketonates. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：291 / 304

页数：14

共 38 条

[1] SYNTHESIS AND THE ELECTRONIC-SPECTRA OF THE FIRST BETA-KETOACYLSILANES AND THEIR LITHIUM ENOLATES - NEW INSIGHTS INTO HYPERCONJUGATION IN ACYLSILANES AND THEIR ENOLATES [J].