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- [41] High power laser-produced plasma source for nano-lithographyLASER-GENERATED AND OTHER LABORATORY X-RAY AND EUV SOURCES, OPTICS, AND APPLICATIONS, 2003, 5196 : 97 - 108Forber, R论文数: 0 引用数: 0 h-index: 0机构: JMAR Technol Inc, Div Res, San Diego, CA 92121 USA JMAR Technol Inc, Div Res, San Diego, CA 92121 USAGaeta, C论文数: 0 引用数: 0 h-index: 0机构: JMAR Technol Inc, Div Res, San Diego, CA 92121 USA JMAR Technol Inc, Div Res, San Diego, CA 92121 USARieger, H论文数: 0 引用数: 0 h-index: 0机构: JMAR Technol Inc, Div Res, San Diego, CA 92121 USA JMAR Technol Inc, Div Res, San Diego, CA 92121 USASiegert, H论文数: 0 引用数: 0 h-index: 0机构: JMAR Technol Inc, Div Res, San Diego, CA 92121 USA JMAR Technol Inc, Div Res, San Diego, CA 92121 USAMcLeod, S论文数: 0 引用数: 0 h-index: 0机构: JMAR Technol Inc, Div Res, San Diego, CA 92121 USA JMAR Technol Inc, Div Res, San Diego, CA 92121 USABoerger, B论文数: 0 引用数: 0 h-index: 0机构: JMAR Technol Inc, Div Res, San Diego, CA 92121 USA JMAR Technol Inc, Div Res, San Diego, CA 92121 USA
- [42] Micromachining of silica glass using EUV radiation of laser-produced plasmaIEEJ Transactions on Electronics, Information and Systems, 2010, 130 (10) : 1779 - 1783+12Takahashi A.论文数: 0 引用数: 0 h-index: 0机构: Department of Health Sciences, School of Medicine, Kyushu University, Fukuoka 812-8582, 3-1-1, Maidashi Department of Health Sciences, School of Medicine, Kyushu University, Fukuoka 812-8582, 3-1-1, MaidashiTorii S.论文数: 0 引用数: 0 h-index: 0机构: Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, 1-1-1, Ten'nodai Department of Health Sciences, School of Medicine, Kyushu University, Fukuoka 812-8582, 3-1-1, MaidashiMakimura T.论文数: 0 引用数: 0 h-index: 0机构: Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, 1-1-1, Ten'nodai Department of Health Sciences, School of Medicine, Kyushu University, Fukuoka 812-8582, 3-1-1, MaidashiMurakami K.论文数: 0 引用数: 0 h-index: 0机构: Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, 1-1-1, Ten'nodai Department of Health Sciences, School of Medicine, Kyushu University, Fukuoka 812-8582, 3-1-1, MaidashiOkazaki K.论文数: 0 引用数: 0 h-index: 0机构: Department of Health Sciences, School of Medicine, Kyushu University, Fukuoka 812-8582, 3-1-1, Maidashi Department of Health Sciences, School of Medicine, Kyushu University, Fukuoka 812-8582, 3-1-1, MaidashiNakamura D.论文数: 0 引用数: 0 h-index: 0机构: Graduate School of Information Sciences and Electrical Engineering, Kyushu University, Nishi-ku, Fukuoka 819-0395, 744, Motooka Department of Health Sciences, School of Medicine, Kyushu University, Fukuoka 812-8582, 3-1-1, MaidashiOkada T.论文数: 0 引用数: 0 h-index: 0机构: Graduate School of Information Sciences and Electrical Engineering, Kyushu University, Nishi-ku, Fukuoka 819-0395, 744, Motooka Department of Health Sciences, School of Medicine, Kyushu University, Fukuoka 812-8582, 3-1-1, MaidashiNiino H.论文数: 0 引用数: 0 h-index: 0机构: Photonic Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8565, 1-1-1, Higashi Department of Health Sciences, School of Medicine, Kyushu University, Fukuoka 812-8582, 3-1-1, Maidashi
- [43] Study on EUV emission properties of laser-produced plasma at ILE, OsakaLASER-GENERATED AND OTHER LABORATORY X-RAY AND EUV SOURCES, OPTICS, AND APPLICATIONS, 2003, 5196 : 289 - 297论文数: 引用数: h-index:机构:论文数: 引用数: h-index:机构:Shigemori, K论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanMiyanaga, N论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan论文数: 引用数: h-index:机构:Nagai, K论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanMatsui, R论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanHibino, T论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanOkuno, T论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanSohbatzadeh, FS论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanTao, Y论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanHashimoto, K论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanYamaura, M论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan论文数: 引用数: h-index:机构:Nagatomo, H论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanZhakhovckii, V论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanNishihra, K论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanUchida, S论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanShimada, Y论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanFurukawa, H论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanNakatsuka, M论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, JapanIzawa, Y论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan
- [44] Measurement of the degree of polarization of the spectra from laser-produced Al plasmaAPPLIED SURFACE SCIENCE, 2002, 197 : 188 - 191论文数: 引用数: h-index:机构:Kim, DE论文数: 0 引用数: 0 h-index: 0机构: Pohang Univ Sci & Technol, Dept Phys, Nam Gu, Pohang 790784, KyungBuk, South Korea Pohang Univ Sci & Technol, Dept Phys, Nam Gu, Pohang 790784, KyungBuk, South Korea
- [45] Thin foil acceleration by the pressure of laser-produced plasma of porous matterLASER INTERACTION WITH MATTER: MEMORIAL TO ACADEMICIAN, NOBEL LAUREATE NG BASOV, 2003, 5228 : 111 - 120Limpouch, J论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicGus'kov, SY论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicGromov, AI论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicKalal, M论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicKasperczuk, A论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicKondrashov, VN论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicKrousky, E论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicKralikova, B论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicMasek, K论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicPisarczyk, T论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicPfeifer, M论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicRohlena, K论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicRozanov, VB论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicSkala, J论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech RepublicUllschmied, J论文数: 0 引用数: 0 h-index: 0机构: Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic Czech Tech Univ, Fac Nucl Sci & Phys Engn, CR-11519 Prague 1, Czech Republic
- [46] Absorption of laser radiation in a laser-produced plasma of Xe: hydrodynamic effects and nonequilibrium ionizationJOURNAL OF PHYSICS D-APPLIED PHYSICS, 2022, 55 (10)Kalmykov, S. G.论文数: 0 引用数: 0 h-index: 0机构: Ioffe Inst, St Petersburg 194021, Russia Ioffe Inst, St Petersburg 194021, RussiaButorin, P. S.论文数: 0 引用数: 0 h-index: 0机构: Ioffe Inst, St Petersburg 194021, Russia Ioffe Inst, St Petersburg 194021, RussiaSasin, M. E.论文数: 0 引用数: 0 h-index: 0机构: Ioffe Inst, St Petersburg 194021, Russia Ioffe Inst, St Petersburg 194021, RussiaZakharov, V. S.论文数: 0 引用数: 0 h-index: 0机构: Keldysh Inst Appl Math, Moscow 125047, Russia Natl Res Ctr, Kurchatov Inst, Moscow 123182, Russia Ioffe Inst, St Petersburg 194021, Russia
- [47] NOx generation in laser-produced plasma in air as a function of dissipated energyOPTICS AND LASER TECHNOLOGY, 2003, 35 (07) : 543 - 546论文数: 引用数: h-index:机构:Cooray, V论文数: 0 引用数: 0 h-index: 0机构: Uppsala Univ, Div Elect & Lightning Res, Dept Mat Sci, Angstrom Lab, SE-75121 Uppsala, Sweden Uppsala Univ, Div Elect & Lightning Res, Dept Mat Sci, Angstrom Lab, SE-75121 Uppsala, Sweden
- [48] EUV Emission from a Regenerative Liquid Target Laser-Produced PlasmaPLASMA AND FUSION RESEARCH, 2025, 20Soramoto, Tatsuya论文数: 0 引用数: 0 h-index: 0机构: Utsunomiya Univ, Dept Elect & Elect Engn, Utsunomiya 3218585, Japan Utsunomiya Univ, Dept Elect & Elect Engn, Utsunomiya 3218585, JapanNiinuma, Takeru论文数: 0 引用数: 0 h-index: 0机构: Utsunomiya Univ, Dept Elect & Elect Engn, Utsunomiya 3218585, Japan Utsunomiya Univ, Dept Elect & Elect Engn, Utsunomiya 3218585, JapanMorita, Hiroki论文数: 0 引用数: 0 h-index: 0机构: Utsunomiya Univ, Dept Elect & Elect Engn, Utsunomiya 3218585, Japan Utsunomiya Univ, Dept Elect & Elect Engn, Utsunomiya 3218585, JapanNamba, Shinichi论文数: 0 引用数: 0 h-index: 0机构: Hiroshima Univ, Dept Adv Sci & Engn, Higashihiroshima 7398527, Japan Utsunomiya Univ, Dept Elect & Elect Engn, Utsunomiya 3218585, JapanHigashiguchi, Takeshi论文数: 0 引用数: 0 h-index: 0机构: Utsunomiya Univ, Dept Elect & Elect Engn, Utsunomiya 3218585, Japan Utsunomiya Univ, Dept Elect & Elect Engn, Utsunomiya 3218585, Japan
- [49] PREUVE and the EXULITE project:: Modular laser-produced plasma EUV sourceHIGH-POWER LASER ABLATION IV, PTS 1 AND 2, 2002, 4760 : 447 - 453Ceccotti, T论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceChichmanian, F论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceDescamps, D论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceHaltebourg, P论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceHergott, JF论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceHulin, S论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceNormand, D论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceSegers, M论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceSublemontier, O论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceSchmidt, M论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceCormont, P论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceNeu, M论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceThro, PY论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceWeulersse, JM论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceBarthod, B论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceBernard, R论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceVéran, E论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceBarbiche, JM论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceD'Aux, P论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, FranceMarquis, E论文数: 0 引用数: 0 h-index: 0机构: CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France CEA Saclay, Grp Applicat Plasmas, DSM DRECAM SPAM, F-91191 Gif Sur Yvette, France
- [50] Laser-produced plasma light source development for extreme ultraviolet lithographyJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (6B): : 3707 - 3712Komori, H论文数: 0 引用数: 0 h-index: 0机构: Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, Japan Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, JapanSoumagne, G论文数: 0 引用数: 0 h-index: 0机构: Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, Japan Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, JapanAbe, T论文数: 0 引用数: 0 h-index: 0机构: Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, Japan Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, JapanSuganuma, T论文数: 0 引用数: 0 h-index: 0机构: Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, Japan Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, JapanImai, Y论文数: 0 引用数: 0 h-index: 0机构: Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, Japan Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, JapanSomeya, H论文数: 0 引用数: 0 h-index: 0机构: Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, Japan Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, JapanTakabayashi, Y论文数: 0 引用数: 0 h-index: 0机构: Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, Japan Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, JapanEndo, A论文数: 0 引用数: 0 h-index: 0机构: Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, Japan Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, JapanToyoda, K论文数: 0 引用数: 0 h-index: 0机构: Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, Japan Hiratsuka Res & Dev Ctr, Extreme Ultraviolet Lithog Syst Dev Assoc, EUVA, Hiratsuka, Kanagawa 2548567, Japan