Machine Learning Solutions for Process Control in Semiconductor Manufacturing

被引：0
|
作者：
Foca, Eugen [1 ]
机构：
[1] Carl Zeiss SMT, PCS Grp, Oberkochen, Germany
来源：
2019 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA) | 2019年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：1
相关论文
共 50 条
  • [41] Credibility Assessment of Machine Learning in a Manufacturing Process Application
    Banyay, Gregory A.
    Worrell, Clarence L.
    Sidener, Scott E.
    Kaizer, Joshua S.
    JOURNAL OF VERIFICATION, VALIDATION AND UNCERTAINTY QUANTIFICATION, 2021, 6 (03):
  • [42] Representation Learning for Wafer Pattern Recognition in Semiconductor Manufacturing Process
    Song, Seunghwan
    Baek, Jun-Geol
    2023 INTERNATIONAL CONFERENCE ON ARTIFICIAL INTELLIGENCE IN INFORMATION AND COMMUNICATION, ICAIIC, 2023, : 264 - 269
  • [43] A review of machine learning in additive manufacturing: design and process
    Chen, Kefan
    Zhang, Peilei
    Yan, Hua
    Chen, Guanglong
    Sun, Tianzhu
    Lu, Qinghua
    Chen, Yu
    Shi, Haichuan
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2024, 135 (3-4): : 1051 - 1087
  • [44] Quantum machine learning for additive manufacturing process monitoring
    Choi, Eunsik
    Sul, Jinhwan
    Kim, Jungin E.
    Hong, Sungjin
    Gonzalez, Beatriz Izquierdo
    Cembellin, Pablo
    Wang, Yan
    Manufacturing Letters, 2024, 41 : 1415 - 1422
  • [45] Machine Learning Approaches for Fault Detection in Semiconductor Manufacturing Process: A Critical Review of Recent Applications and Future Perspectives
    Arpitha, V.
    Pani, A. K.
    CHEMICAL AND BIOCHEMICAL ENGINEERING QUARTERLY, 2022, 36 (01) : 1 - 16
  • [46] Study on Data Preprocessing for Machine Learning Based on Semiconductor Manufacturing Processes
    Park, Ha-Je
    Koo, Yun-Su
    Yang, Hee-Yeong
    Han, Young-Shin
    Nam, Choon-Sung
    SENSORS, 2024, 24 (17)
  • [47] Virtual Metrology in Semiconductor Manufacturing by means of Predictive Machine Learning Models
    Lenz, Benjamin
    Barak, Bernd
    Muehrwald, Julia
    Leicht, Carolin
    2013 12TH INTERNATIONAL CONFERENCE ON MACHINE LEARNING AND APPLICATIONS (ICMLA 2013), VOL 2, 2013, : 174 - 177
  • [48] Hybrid machine learning system for integrated yield management in semiconductor manufacturing
    Kang, BS
    Lee, JH
    Shin, CK
    Yu, SJ
    Park, SC
    EXPERT SYSTEMS WITH APPLICATIONS, 1998, 15 (02) : 123 - 132
  • [49] Probabilistic Modeling and Machine Learning for Preventative Maintenance Prediction in Semiconductor Manufacturing
    Wright, Tori
    Tse, Brian
    Nsiye, Emmanuel
    Azinord, Timothy
    Medina, David
    Mondesire, Sean
    2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC, 2024,
  • [50] Big Data Emergence in Semiconductor Manufacturing Advanced Process Control
    Moyne, James
    Samantaray, Jamini
    Armacost, Mike
    2015 26TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC), 2015, : 130 - 135
12345