Machine Learning Solutions for Process Control in Semiconductor Manufacturing

被引：0
|
作者：
Foca, Eugen [1 ]
机构：
[1] Carl Zeiss SMT, PCS Grp, Oberkochen, Germany
来源：
2019 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA) | 2019年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：1
相关论文
共 50 条
  • [1] Advance process control solutions for semiconductor manufacturing
    Sarfaty, M
    Shanmugasundram, A
    Schwarm, A
    Paik, J
    Zhang, JM
    Pan, R
    Seamons, MJ
    Li, H
    Hung, R
    Parikh, S
    2002 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP: ADVANCING THE SCIENCE OF SEMICONDUCTOR MANUFACTURING EXCELLENCE, 2002, : 101 - 106
  • [2] A Systematic Literature Review of Machine Learning Applications for Process Monitoring and Control in Semiconductor Manufacturing
    Gentner, Tobias
    Breitenbach, Johannes
    Neitzel, Timon
    Schulze, Jacob
    Buettner, Ricardo
    2022 IEEE 46TH ANNUAL COMPUTERS, SOFTWARE, AND APPLICATIONS CONFERENCE (COMPSAC 2022), 2022, : 1081 - 1086
  • [3] Issues and solutions for applying process control to semiconductor manufacturing
    Butler, SW
    PLASMA PROCESSING OF SEMICONDUCTORS, 1997, 336 : 565 - 583
  • [4] Process-Level Machine Learning Applications in Semiconductor Manufacturing
    Susto, Gian Antonio
    Diebold, Alain
    Kyek, Andreas
    Lee, Chia-Yen
    Patel, Nital S.
    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2022, 35 (02) : 155 - 157
  • [5] Reinforcement learning for process control with application in semiconductor manufacturing
    Li, Yanrong
    Du, Juan
    Jiang, Wei
    IISE TRANSACTIONS, 2024, 56 (06) : 585 - 599
  • [6] Applications for Machine Learning in Semiconductor Manufacturing
    Burch, Richard
    Merrick, Luke
    Zhu, Qing
    Honda, Tomonori
    David, Jeff
    2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM), 2021,
  • [7] APPLYING MACHINE LEARNING TO SEMICONDUCTOR MANUFACTURING
    IRANI, KB
    CHENG, J
    FAYYAD, UM
    QIAN, ZG
    IEEE EXPERT-INTELLIGENT SYSTEMS & THEIR APPLICATIONS, 1993, 8 (01): : 41 - 47
  • [8] Machine Learning Technologies for Semiconductor Manufacturing
    Sun, Lifei
    Lyu, Pengfei
    Zhang, Xiao
    Wu, Junjie
    Wang, Qingpeng
    Ervin, Joseph
    Chi, Yushan
    CONFERENCE OF SCIENCE & TECHNOLOGY FOR INTEGRATED CIRCUITS, 2024 CSTIC, 2024,
  • [9] Machine Learning Prediction Model for Automation Equipment Control in Semiconductor Manufacturing
    Abu Bakar, Amri
    2022 IEEE 39TH INTERNATIONAL ELECTRONICS MANUFACTURING TECHNOLOGY CONFERENCE (IEMT), 2022,
  • [10] Microeconomics of process control in semiconductor manufacturing
    Monahan, KM
    COST AND PERFORMANCE IN INTEGRATED CIRCUIT CREATION, 2003, 5043 : 57 - 71
12345