Experimental study of silicon ring resonators and ultra-low losses waveguides for efficient silicon optical interposers

被引：3
|
作者：
Reboud, V. [1 ,2 ]
Blampey, B. [1 ,2 ]
Gindre, P. [1 ,2 ]
Dubray, O. [1 ,2 ]
Fowler, D. [1 ,2 ]
Lemonnier, O. [1 ,2 ]
Grellier, E. [1 ,2 ]
Fournier, M. [1 ,2 ]
Thonnart, Y. [1 ,2 ]
Bernabe, S. [1 ,2 ]
机构：
[1] Univ Grenoble Alpes, Minatec Campus, F-38054 Grenoble, France
[2] CEA Grenoble, LETI, Minatec Campus, F-38054 Grenoble, France
来源：
OPTICAL INTERCONNECTS XVI | 2016年 / 9753卷
关键词：
MODULATOR;
D O I：
10.1117/12.2212665
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We study the optical performances of microring resonator modulators fabricated on 200 mm SOI wafers to select the ring resonator modulators for targeted ONoC and optical interposer applications. Counter-doped ring resonator modulators were fabricated to guarantee the absence of unexpected p-i-n junctions in the ring waveguide due to overlay misalignments inherent to successive fabrication steps. The fabricated add-drop ring resonator modulators showed good DC performances with a V pi L at 1.55 V.cm. Finally, ultra-low loss waveguides were realized to allow long distance data transport on photonic chips.
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收藏
页数：7
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