Nanostructure and Optical Property Investigations of SrTiO3 Films Deposited by Magnetron Sputtering

被引：9

作者：

Xu, Da ^{[1
]}

Yuan, Yafei ^{[1
,2
]}

Zhu, Huanfeng ^{[1
]}

Cheng, Ling ^{[1
]}

Liu, Chunmin ^{[1
]}

Su, Jing ^{[1
]}

Zhang, Xintong ^{[1
]}

Zhang, Hao ^{[1
,3
]}

Zhang, Xia ^{[4
]}

Li, Jing ^{[1
,3
]}

机构：

[1] Fudan Univ, Dept Opt Sci & Engn, Shanghai Engn Res Ctr Ultra Precis Opt Mfg, Shanghai 200433, Peoples R China

[2] Fudan Univ, Sch Informat Sci & Technol, Ctr Intelligent Med Elect Engn, Shanghai 200433, Peoples R China

[3] Fudan Univ, Minist Educ, Key Lab Micro & Nano Photon Struct, Shanghai 200433, Peoples R China

[4] Qufu Normal Univ, Coll Phys Engn, Qufu 273165, Peoples R China

来源：

MATERIALS | 2019年 / 12卷 / 01期

基金：

中国国家自然科学基金; 上海市自然科学基金;

关键词：

strontium titanate film; optical properties; thermal treatment; magnetron sputtering; TITANATE THIN-FILMS; ELECTRICAL-PROPERTIES;

D O I：

10.3390/ma12010138

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Strontium titanate thin films were deposited on a silicon substrate by radio-frequency magnetron sputtering. The structural and optical properties of these films were characterized by X-ray diffraction, high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and spectroscopic ellipsometry, respectively. After annealing at 600-800 degrees C, the as-deposited films changed from amorphous to polycrystalline. It was found that an amorphous interfacial layer appeared between the SrTiO3 layer and Si substrate in each as-deposited film, which grew thicker after annealing. The optical parameters of the SrTiO3 film samples were acquired from ellipsometry spectra by fitting with a Lorentz oscillator model. Moreover, we found that the band gap energy of the samples diminished after thermal treatment.

引用

页数：10

共 22 条

[1] Callaway J, 1974, QUANTUM THEORY SOLID
[2] OPTICAL PROPERTIES AND BAND STRUCTURE OF SRTIO3 AND BATIO3
CARDONA, M
[J]. PHYSICAL REVIEW, 1965, 140 (2A): : A651 - &
[3] DESIGN OF A SCANNING ELLIPSOMETER BY SYNCHRONOUS ROTATION OF THE POLARIZER AND ANALYZER
CHEN, LY
FENG, XW
SU, Y
MA, HZ
QIAN, YH
[J]. APPLIED OPTICS, 1994, 33 (07): : 1299 - 1305
[4] Influence of postdeposition annealing on the structural and optical properties of sputtered zinc oxide film
Gupta, V
Mansingh, A
[J]. JOURNAL OF APPLIED PHYSICS, 1996, 80 (02) : 1063 - 1073
[5] Amorphous and nanocrystalline SrTiO3 thin films
Hubert, T
Beck, U
Kleinke, H
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1996, 196 : 150 - 154
[6] SIZE EFFECT ON THE FERROELECTRIC PHASE-TRANSITION IN PBTIO3 ULTRAFINE PARTICLES
ISHIKAWA, K
YOSHIKAWA, K
OKADA, N
[J]. PHYSICAL REVIEW B, 1988, 37 (10): : 5852 - 5855
[7] Large Seebeck coefficients and thermoelectric power factor of La-doped SrTiO3 thin films
Jalan, Bharat
Stemmer, Susanne
[J]. APPLIED PHYSICS LETTERS, 2010, 97 (04)
[8] Preparation and electrical properties of SrTiO3 thin films deposited by liquid source metal-organic chemical vapor deposition (MOCVD)
Kang, CS
Hwang, CS
Cho, HJ
Lee, BT
Park, SO
Kim, JW
Horii, H
Lee, SI
Koh, YB
Lee, MY
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (9B): : 4890 - 4895
[9] Effect of annealing in processing of strontium titanate thin films by ALD
Kosola, A
Putkonen, M
Johansson, LS
Niinistö, L
[J]. APPLIED SURFACE SCIENCE, 2003, 211 (1-4) : 102 - 112
[10] Highly tunable SrTiO3/DyScO3 heterostructures for applications in the terahertz range
Kuzel, P.
Kadlec, F.
Petzelt, J.
Schubert, J.
Panaitov, G.
[J]. APPLIED PHYSICS LETTERS, 2007, 91 (23)

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