Rapid prototyping of nanostructured materials with a focused ion beam

被引:21
作者
Wilhelmi, Oliver [1 ]
Reyntjens, Steve [1 ]
Mitterbauer, Christoph [1 ]
Roussel, Laurent [1 ]
Stokes, Debbie J. [1 ]
Hubert, Dominique H. W. [1 ]
机构
[1] FEI Co, NL-5600 Eindhoven, Netherlands
关键词
nanofabrication; nano-prototyping; DualBeam; FIBSEM;
D O I
10.1143/JJAP.47.5010
中图分类号
O59 [应用物理学];
学科分类号
摘要
State-of-the-art focused ion beam (FIB) technology combined with high-performance scanning electron microscopy (SEM) is making a big impact on nanotechnology, particularly with the ability to use either focused ions or electrons to perform advanced nanolithography. Achieving the highest standards requires an understanding of the physics and chemistry of the system as a whole, which contains ions and electrons of various energies and origins, substrates with a range of electrical and mechanical properties, and reactive gases capable of specific effects on sputtering and re-deposition. We have built up a detailed knowledge of these complex parameters and, accordingly, have developed new strategies, allowing us to generate high resolution nanolithographic structures down to a few nanometers. We compare and contrast different strategies in order to demonstrate the importance of factors such as single- or multi-pass execution as well as milling order and time-dependent considerations.
引用
收藏
页码:5010 / 5014
页数:5
相关论文
共 8 条
[1]  
CALLEGARI V, 2007, 51 INT C EL ION PHOT
[2]   Spontaneous growth of uniformly distributed In nanodots and InI3 nanowires on InP induced by a focused ion beam [J].
Callegari, Victor ;
Nellen, Philipp M. .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2007, 204 (06) :1665-1671
[3]   Microfabrication of microlens array by focused ion beam technology [J].
Fu, YQ ;
Kok, N ;
Bryan, A .
MICROELECTRONIC ENGINEERING, 2000, 54 (3-4) :211-221
[4]  
Giannuzzi L.A., 2005, J Micoscopy and Micoanalysis, V11, P828, DOI DOI 10.1017/S1431927605507797
[5]  
Giannuzzi LA, 2005, INTRODUCTION TO FOCUSED ION BEAMS: INSTRUMENTATION, THEORY, TECHNIQUES AND PRACTICE, P13, DOI 10.1007/0-387-23313-X_2
[6]   FIB-milling of photonic structures and sputtering simulation [J].
Nellen, PM ;
Callegari, V ;
Brönnimann, R .
MICROELECTRONIC ENGINEERING, 2006, 83 (4-9) :1805-1808
[7]  
Prenitzer BI, 2003, MICROSC MICROANAL, V9, P216, DOI [10.1017/S1431927603030034, 10.1017/S143192760030034]
[8]   Focused ion beam (FIB) milling of electrically insulating specimens using simultaneous primary electron and ion beam irradiation [J].
Stokes, D. J. ;
Vystavel, T. ;
Morrissey, F. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (03) :874-877