Photothermal deflection microscope using linear-motor-driven pulse stages and its applications

被引：4

作者：

Hoshimiya, T ^{[1
]}

Miyamoto, K ^{[1
]}

机构：

[1] Tohoku Gakuin Univ, Dept Appl Phys, Tagajo, Miyagi 9858537, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2001年 / 40卷 / 5B期

关键词：

photothermal; microscope; PAM; linear motor; imaging;

D O I：

10.1143/JJAP.40.3591

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A photothermal deflection microscope using linear-motor-driven slide stages for scanning was designed and fabricated. The photothermal microscope achieved high-resolution scanning (0.1 mum step), fast scanning (40 mm/s) and random access. It operates in a conventional operating software environment as a photoacoustic microscope and is capable of operating in an open-air environment. It was applied to the imaging of semiconductor microdevices such as integrated circuits. Resolution up to 8-12 mum was achieved.

引用

页码：3591 / 3592

页数：2