Photothermal deflection microscope using linear-motor-driven pulse stages and its applications

被引：4
|
作者：
Hoshimiya, T [1 ]
Miyamoto, K [1 ]
机构：
[1] Tohoku Gakuin Univ, Dept Appl Phys, Tagajo, Miyagi 9858537, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2001年 / 40卷 / 5B期
关键词：
photothermal; microscope; PAM; linear motor; imaging;
D O I：
10.1143/JJAP.40.3591
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A photothermal deflection microscope using linear-motor-driven slide stages for scanning was designed and fabricated. The photothermal microscope achieved high-resolution scanning (0.1 mum step), fast scanning (40 mm/s) and random access. It operates in a conventional operating software environment as a photoacoustic microscope and is capable of operating in an open-air environment. It was applied to the imaging of semiconductor microdevices such as integrated circuits. Resolution up to 8-12 mum was achieved.
引用
收藏
页码：3591 / 3592
页数：2
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