Thermoelastic coupling effect on a micro-machined beam resonator

被引：77

作者：

Guo, FL ^{[1
]}

Rogerson, GA ^{[1
]}

机构：

[1] Univ Salford, Dept Math & Comp Sci, Salford M5 4WT, Lancs, England

来源：

MECHANICS RESEARCH COMMUNICATIONS | 2003年 / 30卷 / 06期

关键词：

micro-machined resonator; thermo-elasticity; frequency shift;

D O I：

10.1016/S0093-6413(03)00061-2

中图分类号：

O3 [力学];

学科分类号：

08 ; 0801 ;

摘要：

In this paper, the effect of thermoelastic coupling on a micro-machined resonator is studied. The calculated results show that the frequency shift ratio caused by thermoelastic coupling is of the order of 10(-3), which is much larger than that of air-damping. Furthermore, the non-dimensional frequency is scale-dependent with thermoelastic coupling being considered. In contrast, the non-dimensional frequency only depends upon the ratio of thickness to length when the themoelastic coupling effect is disregarded. (C) 2003 Elsevier Ltd. All rights reserved.

引用

页码：513 / 518

页数：6

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