Fabrication of Micro Metallic Valve and Pump

Fabrication of micro devices by using micro metal forming was proposed by the authors. We developed a desktop servo-press machine with precise tooling system. Precise press forming processes including micro forging and micro joining has been carried out in a progressive die. In this study, micro metallic valve and pump were fabricated by using the precise press forming. The components are made of sheet metals, and assembled in to a unit in the progressive die. A micro check-valve with a diameter of 3mm and a length of 3.2mm was fabricated, and the property of flow resistance was evaluated. The results show that the check valve has high property of leakage proof. Since the valve is a unit parts with dimensions of several millimeters, it has advantage to be adapted to various pump design. Here, two kinds of micro pumps with the check-valves were fabricated. One is diaphragm pump actuated by vibration of the diaphragm, and another is tube-shaped pump actuated by resonation. The flow quantities of the pumps were evaluated and the results show that both of the pumps have high pumping performance.