Digital sound reconstruction using arrays of CMOS-MEMS microspeakers

被引:0
|
作者
Diamond, BM [1 ]
Neumann, JJ [1 ]
Gabriel, KJ [1 ]
机构
[1] Carnegie Mellon Univ, Dept Elect & Comp Engn, MEMS Lab, Pittsburgh, PA 15213 USA
来源
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2003年
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the development of a direct digital method for producing sound using an array of CMOS-MEMS microspeakers. In a previous article [1], we described the theory behind digital sound reconstruction, characterized the acoustic response of a single CMOS-MEMS membrane, and showed experimental results involving a 3-bit (7 speaker) array composed of individual microspeaker chips. In this work, we report on the design, fabrication, and operation of an 8-bit (255 speaker) array integrated on a single chip. With this new device, we have been able to further study sound reconstruction and understand the sources of harmonic distortion and waveform quality that are essential to creating a complete digital sound system.
引用
收藏
页码:238 / 241
页数:4
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