Spin Coating on Spherical Surface with Large Central Angles

被引:7
作者
Liu, Huan [1 ]
Fang, Xudong [2 ]
Meng, Le [3 ]
Wang, Shanshan [3 ]
机构
[1] Xian Technol Univ, Minist Educ, Key Lab Thin Film & Opt Mfg Technol, Xian 710032, Shaanxi, Peoples R China
[2] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
[3] Xian Technol Univ, Sch Optoelect Engn, Xian 710032, Shaanxi, Peoples R China
关键词
spin coating; spherical surface; film thickness; uniformity; large central angle; DIFFRACTIVE OPTICAL-ELEMENTS; CONCAVE LENS SURFACE; ROTATING-DISK; POLYMER-FILMS; LIQUID; FLOW; FABRICATION; MODEL; THIN;
D O I
10.3390/coatings7080124
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Spin coating is one of the dominant processes for producing photoresistant thin films in integrated circuit manufacturing. The application of this process mainly focuses on flat surfaces. With the development of science and technology, the spin coating process is no longer restricted to flattened geometry. The demand for uniform thin films on curved surfaces urgently needs to be met, such as for the fabrication of anti-electromagnetic metal shielding grids on the window of fairings and grating on spherical lens. This is a challenging problem, and a fundamental mechanism is indispensable to provide guidance. However, few models have been reported about spinning a coating on curved geometry with a large central angle. To provide support for solving the problem of spin coating on a spherical surface with a large central angle, this paper presents a formulation for modeling the spin coating process on a spherical surface with a central angle close to 90 degrees and experiments that were completed to validate it. The film thickness evolution and uniformity of film thickness on a spherical surface are studied using this model and are compared with the existing literature to determine the potential advantages of the new model. Simulation results show that the uniformity of final film thickness is not ideal for uniform initial film thickness distribution. One dimensionless parameter is defined as the dominating factor to control film thickness and uniformity, which is related to the processing parameters. As demonstrated by the experimental results, this model can be adopted to predict film the thickness profile on spherical surfaces with large central angles.
引用
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页数:13
相关论文
共 20 条
[1]   ON THE FLOW OF A NON-NEWTONIAN LIQUID ON A ROTATING DISK [J].
ACRIVOS, A ;
SHAH, MJ ;
PETERSEN, EE .
JOURNAL OF APPLIED PHYSICS, 1960, 31 (06) :963-968
[2]  
Blackburn W. P., 2002, U. S. Patent, Patent No. [6,352,747, 6352747]
[3]   SPIN COATING - ONE-DIMENSIONAL MODEL [J].
BORNSIDE, DE ;
MACOSKO, CW ;
SCRIVEN, LE .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (11) :5185-5193
[4]  
BORNSIDE DE, 1987, J IMAGING TECHNOL, V13, P122
[5]   MECHANISM FOR THE LOCAL PLANARIZATION OF MICROSCOPICALLY ROUGH SURFACES BY DRYING THIN-FILMS OF SPIN-COATED POLYMER SOLVENT SOLUTIONS [J].
BORNSIDE, DE .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1990, 137 (08) :2589-2595
[6]   Fluorine Based Superhydrophobic Coatings [J].
Brassard, Jean-Denis ;
Sarkar, D. K. ;
Perron, Jean .
APPLIED SCIENCES-BASEL, 2012, 2 (02) :453-464
[7]  
Brytsche H. H., 1998, U. S. Patent, Patent No. [5,753,301, 5753301]
[8]   Research on the optical field distribution and micro-fabrication model in convex-surface laser lithography [J].
Chen, Long-jiang ;
Liang, Yi-yong ;
Wang, Kai-wei ;
Luo, Jian-bo ;
Zhang, Chun-hui ;
Liang, Jing-yu ;
Yang, Guo-guang .
OPTICS COMMUNICATIONS, 2010, 283 (12) :2631-2639
[9]   Mathematical modeling and experimental study on photoresist whirl-coating in convex-surface laser lithography [J].
Chen, Long-jiang ;
Liang, Yi-yong ;
Luo, Jian-bo ;
Zhang, Chun-hui ;
Yang, Guo-guang .
JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2009, 11 (10)
[10]   FLOW OF A VISCOUS LIQUID ON A ROTATING DISK [J].
EMSLIE, AG ;
BONNER, FT ;
PECK, LG .
JOURNAL OF APPLIED PHYSICS, 1958, 29 (05) :858-862