Effective gray-scale in lithographically-scribed planar holographic Bragg reflectors

被引：0
|
作者：
Iazikov, D [1 ]
Greiner, C [1 ]
Mossberg, TW [1 ]
机构：
[1] LightSmyth Technol Inc, Eugene, OR 97041 USA
来源：
NANO-AND MICRO-OPTICS FOR INFORMATION SYSTEMS | 2003年 / 5225卷
关键词：
integrated optics; bragg reflector; planar waveguide; lithography; holography;
D O I：
10.1117/12.517217
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We demonstrate that holographic Bragg reflector grating structures, photolithographically scribed in planar waveguides, support a unique approach to apodization and overlay that uses fixed-depth etching and partial contour writing to achieve continuous reflective amplitude control.
引用
收藏
页码：155 / 162
页数：8
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