Preparation of carbon microcoils by catalytic methane hot-wire CVD process

被引：6

作者：

Chen, Xiuqin ^{[1
]}

Hasegawa, M. ^{[1
]}

Yang, Shaoming ^{[1
]}

Nitta, Y. ^{[1
]}

Katsuno, T. ^{[1
]}

Motojima, S. ^{[1
]}

机构：

[1] Gifu Univ, Fac Engn, Dept Appl Chem, Gifu 5011193, Japan

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 05期

基金：

日本学术振兴会;

关键词：

carbon microcoil; methane; hot-wire CVD; preparation; morphology; SEM;

D O I：

10.1016/j.tsf.2007.06.051

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Three-dimensional (3D) double-helix carbon microcoils (CMCs) were synthesized by the catalytic pyrolysis of methane using Ni catalyst in various hot-wire CVD processes. The most effective process is: using preheating method, in which methane was preheated at 1500 degrees C in a upper reaction tube by a hot wire, and chemical vapor deposition of carbon then occurred at 700-750 degrees C in a lower reaction tube, where CMCs were synthesized. The growth morphologies and microstructure were examined and compared with the conventional CMCs grown by acetylene catalytic pyrolysis. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：714 / 717

页数：4

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