A MEMS-Based High-Fineness Fiber-Optic Fabry-Perot Pressure Sensor for High-Temperature Application

被引：14
|
作者：
Wang, Suwei [1 ]
Wang, Jun [1 ]
Li, Wenhao [1 ]
Liu, Yangyang [1 ]
Li, Jiashun [1 ]
Jia, Pinggang [1 ]
机构：
[1] North Univ China, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China
来源：
MICROMACHINES | 2022年 / 13卷 / 05期
关键词：
high temperature; pressure sensor; fiber-optic Fabry-Perot; high fineness;
D O I：
10.3390/mi13050763
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
In this paper, a high-fineness fiber-optic Fabry-Perot high-temperature pressure sensor, based on MEMS technology, is proposed and experimentally verified. The Faber-Perot cavity of the pressure sensor is formed by the anodic bonding of a sensitive silicon diaphragm and a Pyrex glass; a high-fineness interference signal is obtained by coating the interface surface with a high-reflection film, so as to simplify the signal demodulation system. The experimental results show that the pressure sensitivity of this sensor is 55.468 nm/MPa, and the temperature coefficient is 0.01859 nm/degrees C at 25 similar to 300 degrees C. The fiber-optic pressure sensor has the following advantages: high fineness, high temperature tolerance, high consistency and simple demodulation, resulting in a wide application prospect in the field of high-temperature pressure testing.
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页数：9
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