New Method for the Determination of the Electron Temperature from Langmuir Probe Characteristics

被引：0

作者：

Hannemann, M. ^{[1
]}

机构：

[1] Leibniz Inst Plasma Sci & Technol Greifswald eV, D-17489 Greifswald, Germany

来源：

CONTRIBUTIONS TO PLASMA PHYSICS | 2010年 / 50卷 / 09期

关键词：

Langmuir probe; eedf; electron temperature; shift; smoothing; digital filter; rf-discharge; PLASMA; DISCHARGES;

D O I：

10.1002/ctpp.201010135

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The electron retarding current collected by a Langmuir probe in a plasma possessing a Maxwellian electron energy distribution function is a an exponential function. If such a current is smoothed by a non-recursive filter the result is a product of the original current and a factor independent on probe voltage. This leads to a shift between the floating potentials of smoothed and unsmoothed probe current from which the electron temperature V(e) may be obtained. A suitable smoothing filter is chosen and all means necessary for the practical realization of the method are given. The influence of the ion current on the determined value of Ve is investigated. The convenience of the method is shown by means of testing calculations and a measuring example. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页码：802 / 807

页数：6

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