Gate modulation in carbon nanotube field effect transistors-based NH3 gas sensors

被引:43
作者
Peng, Ning [1 ]
Zhang, Qing [1 ]
Lee, Yi Chau [1 ]
Tan, Ooi Kiang [1 ]
Marzari, Nicola [2 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Ctr Microelect, Singapore 639798, Singapore
[2] 13 5066 MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
来源
SENSORS AND ACTUATORS B-CHEMICAL | 2008年 / 132卷 / 01期
关键词
ammonia; carbon nanotube; field effect transistor; gas sensor; Schottky barrier;
D O I
10.1016/j.snb.2008.01.025
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Single-walled carbon nanotube field effect transistors (CNTFETs) are used as NH3 gas sensors and their sensing performances are studied in terms of gate biasing effect. By applying a positive gate bias, a high sensitivity of 178.5% per ppm, is achieved. The reversibility of the CNTFET sensors is also found to be significantly improved under the appropriate positive gate voltages. In this study, an in-depth understanding of how the electrical properties of the CNTFETs are affected by NH3 gas is gained. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:191 / 195
页数:5
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