Microstructural design of advanced architectures in titanium/platinum thin films by laser interference metallurgy

被引：7
作者：
Catrin, Rodolphe [1 ]
Lasagni, Andres Fabian
Gachot, Carsten [1 ]
Schmid, Ulrich [2 ]
Muecklich, Frank [1 ]
机构：
[1] Univ Saarland, Chair Funct Mat, D-66041 Saarbrucken, Germany
[2] Univ Saarland, Chair Micromech Microfluid Microactuators, Mechatron Dept, D-66123 Saarbrucken, Germany
来源：
ADVANCED ENGINEERING MATERIALS | 2008年 / 10卷 / 05期
关键词：
D O I：
10.1002/adem.200700328
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The effect of Laser Interference Metallurgy (LIMET) was studied in modifying the microstructure of Titanium/Platinum (Ti/Pt) thin films from the nano to micrometer scale. The study has analyzed the microstructure of the irradiated thin films using Electron Backscatter Diffraction (EBSD). Nanoindentation experiments determined the changes in the hardness induced locally by periodic heat treatment during laser irradiation. Different microstructural architecture were fabricated on Ti/Pt thin films using single pulse interference experiments. The relevance of these microstructural architectures in the domain of grain-size composites for were resistance thin films in MEMS was examined. The laser Interference Metallurgy offers the possibility of fabricating periodic structures with tailored morphologies in the nano and micrometer scales. Results showed that such microstructural structures allows the films exhibiting different mechanical properties.
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收藏
页码：466 / 470
页数：5
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